8/26/2012	12:33:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/26/2012	12:33:50 PM	Recipe started at 12:33 PM
8/26/2012	12:33:50 PM	Helium valve closed
8/26/2012	12:33:50 PM	H2 valve closed
8/26/2012	12:33:50 PM	BCl3 valve closed
8/26/2012	12:33:50 PM	PH3 valve closed
8/26/2012	12:33:50 PM	SiCl4 pre valve closed
8/26/2012	12:33:50 PM	SiCl4 post valve closed
8/26/2012	12:33:50 PM	Main Vac valve closed
8/26/2012	12:33:50 PM	Bypass valve closed
8/26/2012	12:33:50 PM	Bubbler valve closed
8/26/2012	12:33:50 PM	Helium MFC set to  0.000000
8/26/2012	12:33:50 PM	H2 MFC set to  0.000000
8/26/2012	12:33:50 PM	BCl3 MFC set to  0.000000
8/26/2012	12:33:50 PM	PH3 MFC set to  0.000000
8/26/2012	12:33:50 PM	SiCl4 MFC set to  0.000000
8/26/2012	12:33:50 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	12:33:50 PM	Tube furnace set to 0
8/26/2012	12:33:53 PM	H2 valve closed
8/26/2012	12:33:53 PM	BCl3 valve closed
8/26/2012	12:33:53 PM	PH3 valve closed
8/26/2012	12:33:53 PM	SiCl4 pre valve closed
8/26/2012	12:33:53 PM	SiCl4 post valve closed
8/26/2012	12:33:53 PM	Main Vac valve closed
8/26/2012	12:33:53 PM	Bypass valve closed
8/26/2012	12:33:53 PM	Bubbler valve closed
8/26/2012	12:33:53 PM	Helium valve opened
8/26/2012	12:33:53 PM	Helium MFC set to  500.000000
8/26/2012	12:33:53 PM	H2 MFC set to  0.000000
8/26/2012	12:33:53 PM	BCl3 MFC set to  0.000000
8/26/2012	12:33:53 PM	PH3 MFC set to  0.000000
8/26/2012	12:33:53 PM	SiCl4 MFC set to  0.000000
8/26/2012	12:33:53 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	12:33:53 PM	Tube furnace set to 0
8/26/2012	12:35:06 PM	Helium valve closed
8/26/2012	12:35:06 PM	H2 valve closed
8/26/2012	12:35:06 PM	BCl3 valve closed
8/26/2012	12:35:06 PM	PH3 valve closed
8/26/2012	12:35:06 PM	SiCl4 pre valve closed
8/26/2012	12:35:06 PM	SiCl4 post valve closed
8/26/2012	12:35:06 PM	Main Vac valve closed
8/26/2012	12:35:06 PM	Bypass valve closed
8/26/2012	12:35:06 PM	Bubbler valve closed
8/26/2012	12:35:06 PM	Helium MFC set to  0.000000
8/26/2012	12:35:06 PM	H2 MFC set to  0.000000
8/26/2012	12:35:06 PM	BCl3 MFC set to  0.000000
8/26/2012	12:35:06 PM	PH3 MFC set to  0.000000
8/26/2012	12:35:06 PM	SiCl4 MFC set to  0.000000
8/26/2012	12:35:06 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	12:35:06 PM	Tube furnace set to 0
8/26/2012	12:35:07 PM	Run finished at 12:35 PM
8/26/2012	12:35:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/26/2012	12:44:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2012	12:44:40 PM	Recipe started at 12:44 PM
8/26/2012	12:44:40 PM	Helium valve closed
8/26/2012	12:44:40 PM	H2 valve closed
8/26/2012	12:44:40 PM	BCl3 valve closed
8/26/2012	12:44:40 PM	PH3 valve closed
8/26/2012	12:44:40 PM	SiCl4 pre valve closed
8/26/2012	12:44:40 PM	SiCl4 post valve closed
8/26/2012	12:44:40 PM	Main Vac valve closed
8/26/2012	12:44:40 PM	Bubbler valve closed
8/26/2012	12:44:40 PM	Bypass valve opened
8/26/2012	12:44:40 PM	Helium MFC set to  0.000000
8/26/2012	12:44:40 PM	H2 MFC set to  0.000000
8/26/2012	12:44:40 PM	BCl3 MFC set to  0.000000
8/26/2012	12:44:40 PM	PH3 MFC set to  0.000000
8/26/2012	12:44:40 PM	SiCl4 MFC set to  0.000000
8/26/2012	12:44:40 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	12:44:40 PM	Tube furnace set to 0
8/26/2012	12:46:06 PM	Helium valve closed
8/26/2012	12:46:06 PM	H2 valve closed
8/26/2012	12:46:06 PM	BCl3 valve closed
8/26/2012	12:46:06 PM	PH3 valve closed
8/26/2012	12:46:06 PM	SiCl4 pre valve closed
8/26/2012	12:46:06 PM	SiCl4 post valve closed
8/26/2012	12:46:06 PM	Main Vac valve closed
8/26/2012	12:46:06 PM	Bubbler valve closed
8/26/2012	12:46:06 PM	Bypass valve opened
8/26/2012	12:46:06 PM	Helium MFC set to  0.000000
8/26/2012	12:46:06 PM	H2 MFC set to  0.000000
8/26/2012	12:46:06 PM	BCl3 MFC set to  0.000000
8/26/2012	12:46:06 PM	PH3 MFC set to  0.000000
8/26/2012	12:46:06 PM	SiCl4 MFC set to  0.000000
8/26/2012	12:46:06 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	12:46:06 PM	Tube furnace set to 0
8/26/2012	12:47:06 PM	Helium valve closed
8/26/2012	12:47:06 PM	H2 valve closed
8/26/2012	12:47:06 PM	BCl3 valve closed
8/26/2012	12:47:06 PM	PH3 valve closed
8/26/2012	12:47:06 PM	SiCl4 pre valve closed
8/26/2012	12:47:06 PM	SiCl4 post valve closed
8/26/2012	12:47:06 PM	Bypass valve closed
8/26/2012	12:47:06 PM	Bubbler valve closed
8/26/2012	12:47:06 PM	Main Vac valve opened
8/26/2012	12:47:06 PM	Helium MFC set to  0.000000
8/26/2012	12:47:06 PM	H2 MFC set to  0.000000
8/26/2012	12:47:06 PM	BCl3 MFC set to  0.000000
8/26/2012	12:47:06 PM	PH3 MFC set to  0.000000
8/26/2012	12:47:06 PM	SiCl4 MFC set to  0.000000
8/26/2012	12:47:06 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	12:47:06 PM	Tube furnace set to 0
8/26/2012	12:47:07 PM	Run finished at 12:47 PM
8/26/2012	12:47:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2012	1:24:09 PM	Recipe started at 1:24 PM
8/26/2012	1:24:09 PM	Helium valve closed
8/26/2012	1:24:09 PM	H2 valve closed
8/26/2012	1:24:09 PM	BCl3 valve closed
8/26/2012	1:24:09 PM	PH3 valve closed
8/26/2012	1:24:09 PM	SiCl4 pre valve closed
8/26/2012	1:24:09 PM	SiCl4 post valve closed
8/26/2012	1:24:09 PM	Bypass valve closed
8/26/2012	1:24:09 PM	Bubbler valve closed
8/26/2012	1:24:09 PM	Main Vac valve opened
8/26/2012	1:24:09 PM	Helium MFC set to  0.000000
8/26/2012	1:24:09 PM	H2 MFC set to  0.000000
8/26/2012	1:24:09 PM	BCl3 MFC set to  0.000000
8/26/2012	1:24:09 PM	PH3 MFC set to  0.000000
8/26/2012	1:24:09 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:24:09 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:24:10 PM	Tube furnace set to 150
8/26/2012	1:24:15 PM	H2 valve closed
8/26/2012	1:24:15 PM	BCl3 valve closed
8/26/2012	1:24:15 PM	PH3 valve closed
8/26/2012	1:24:15 PM	SiCl4 pre valve closed
8/26/2012	1:24:15 PM	SiCl4 post valve closed
8/26/2012	1:24:15 PM	Bypass valve closed
8/26/2012	1:24:15 PM	Bubbler valve closed
8/26/2012	1:24:15 PM	Helium valve opened
8/26/2012	1:24:15 PM	Main Vac valve opened
8/26/2012	1:24:15 PM	Helium MFC set to  20.000000
8/26/2012	1:24:15 PM	H2 MFC set to  0.000000
8/26/2012	1:24:15 PM	BCl3 MFC set to  0.000000
8/26/2012	1:24:15 PM	PH3 MFC set to  0.000000
8/26/2012	1:24:15 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:24:15 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:24:15 PM	Tube furnace set to 150
8/26/2012	1:24:45 PM	Helium valve closed
8/26/2012	1:24:45 PM	H2 valve closed
8/26/2012	1:24:45 PM	BCl3 valve closed
8/26/2012	1:24:45 PM	PH3 valve closed
8/26/2012	1:24:45 PM	SiCl4 pre valve closed
8/26/2012	1:24:45 PM	SiCl4 post valve closed
8/26/2012	1:24:45 PM	Bypass valve closed
8/26/2012	1:24:45 PM	Bubbler valve closed
8/26/2012	1:24:45 PM	Main Vac valve opened
8/26/2012	1:24:45 PM	Helium MFC set to  0.000000
8/26/2012	1:24:45 PM	H2 MFC set to  0.000000
8/26/2012	1:24:45 PM	BCl3 MFC set to  0.000000
8/26/2012	1:24:45 PM	PH3 MFC set to  0.000000
8/26/2012	1:24:45 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:24:45 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:24:45 PM	Tube furnace set to 150
8/26/2012	1:25:15 PM	H2 valve closed
8/26/2012	1:25:15 PM	BCl3 valve closed
8/26/2012	1:25:15 PM	PH3 valve closed
8/26/2012	1:25:15 PM	SiCl4 pre valve closed
8/26/2012	1:25:15 PM	SiCl4 post valve closed
8/26/2012	1:25:15 PM	Bypass valve closed
8/26/2012	1:25:15 PM	Bubbler valve closed
8/26/2012	1:25:15 PM	Helium valve opened
8/26/2012	1:25:15 PM	Main Vac valve opened
8/26/2012	1:25:15 PM	Helium MFC set to  20.000000
8/26/2012	1:25:15 PM	H2 MFC set to  0.000000
8/26/2012	1:25:15 PM	BCl3 MFC set to  0.000000
8/26/2012	1:25:15 PM	PH3 MFC set to  0.000000
8/26/2012	1:25:15 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:25:15 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:25:15 PM	Tube furnace set to 150
8/26/2012	1:25:45 PM	Helium valve closed
8/26/2012	1:25:45 PM	H2 valve closed
8/26/2012	1:25:45 PM	BCl3 valve closed
8/26/2012	1:25:45 PM	PH3 valve closed
8/26/2012	1:25:45 PM	SiCl4 pre valve closed
8/26/2012	1:25:45 PM	SiCl4 post valve closed
8/26/2012	1:25:45 PM	Bypass valve closed
8/26/2012	1:25:45 PM	Bubbler valve closed
8/26/2012	1:25:45 PM	Main Vac valve opened
8/26/2012	1:25:45 PM	Helium MFC set to  0.000000
8/26/2012	1:25:45 PM	H2 MFC set to  0.000000
8/26/2012	1:25:45 PM	BCl3 MFC set to  0.000000
8/26/2012	1:25:45 PM	PH3 MFC set to  0.000000
8/26/2012	1:25:45 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:25:45 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:25:45 PM	Tube furnace set to 150
8/26/2012	1:26:15 PM	H2 valve closed
8/26/2012	1:26:15 PM	BCl3 valve closed
8/26/2012	1:26:15 PM	PH3 valve closed
8/26/2012	1:26:15 PM	SiCl4 pre valve closed
8/26/2012	1:26:16 PM	SiCl4 post valve closed
8/26/2012	1:26:16 PM	Bypass valve closed
8/26/2012	1:26:16 PM	Bubbler valve closed
8/26/2012	1:26:16 PM	Helium valve opened
8/26/2012	1:26:16 PM	Main Vac valve opened
8/26/2012	1:26:16 PM	Helium MFC set to  20.000000
8/26/2012	1:26:16 PM	H2 MFC set to  0.000000
8/26/2012	1:26:16 PM	BCl3 MFC set to  0.000000
8/26/2012	1:26:16 PM	PH3 MFC set to  0.000000
8/26/2012	1:26:16 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:26:16 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:26:16 PM	Tube furnace set to 150
8/26/2012	1:26:46 PM	Helium valve closed
8/26/2012	1:26:46 PM	H2 valve closed
8/26/2012	1:26:46 PM	BCl3 valve closed
8/26/2012	1:26:46 PM	PH3 valve closed
8/26/2012	1:26:46 PM	SiCl4 pre valve closed
8/26/2012	1:26:46 PM	SiCl4 post valve closed
8/26/2012	1:26:46 PM	Bypass valve closed
8/26/2012	1:26:46 PM	Bubbler valve closed
8/26/2012	1:26:46 PM	Main Vac valve opened
8/26/2012	1:26:46 PM	Helium MFC set to  0.000000
8/26/2012	1:26:46 PM	H2 MFC set to  0.000000
8/26/2012	1:26:46 PM	BCl3 MFC set to  0.000000
8/26/2012	1:26:46 PM	PH3 MFC set to  0.000000
8/26/2012	1:26:46 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:26:46 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:26:46 PM	Tube furnace set to 150
8/26/2012	1:27:16 PM	H2 valve closed
8/26/2012	1:27:16 PM	BCl3 valve closed
8/26/2012	1:27:16 PM	PH3 valve closed
8/26/2012	1:27:16 PM	SiCl4 pre valve closed
8/26/2012	1:27:16 PM	SiCl4 post valve closed
8/26/2012	1:27:16 PM	Bypass valve closed
8/26/2012	1:27:16 PM	Bubbler valve closed
8/26/2012	1:27:16 PM	Helium valve opened
8/26/2012	1:27:16 PM	Main Vac valve opened
8/26/2012	1:27:16 PM	Helium MFC set to  20.000000
8/26/2012	1:27:16 PM	H2 MFC set to  0.000000
8/26/2012	1:27:16 PM	BCl3 MFC set to  0.000000
8/26/2012	1:27:16 PM	PH3 MFC set to  0.000000
8/26/2012	1:27:16 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:27:16 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:27:16 PM	Tube furnace set to 150
8/26/2012	1:27:46 PM	Helium valve closed
8/26/2012	1:27:46 PM	H2 valve closed
8/26/2012	1:27:46 PM	BCl3 valve closed
8/26/2012	1:27:46 PM	PH3 valve closed
8/26/2012	1:27:46 PM	SiCl4 pre valve closed
8/26/2012	1:27:46 PM	SiCl4 post valve closed
8/26/2012	1:27:46 PM	Bypass valve closed
8/26/2012	1:27:46 PM	Bubbler valve closed
8/26/2012	1:27:46 PM	Main Vac valve opened
8/26/2012	1:27:46 PM	Helium MFC set to  0.000000
8/26/2012	1:27:46 PM	H2 MFC set to  0.000000
8/26/2012	1:27:46 PM	BCl3 MFC set to  0.000000
8/26/2012	1:27:46 PM	PH3 MFC set to  0.000000
8/26/2012	1:27:46 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:27:46 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:27:46 PM	Tube furnace set to 150
8/26/2012	1:28:16 PM	H2 valve closed
8/26/2012	1:28:16 PM	BCl3 valve closed
8/26/2012	1:28:16 PM	PH3 valve closed
8/26/2012	1:28:16 PM	SiCl4 pre valve closed
8/26/2012	1:28:16 PM	SiCl4 post valve closed
8/26/2012	1:28:16 PM	Bypass valve closed
8/26/2012	1:28:16 PM	Bubbler valve closed
8/26/2012	1:28:16 PM	Helium valve opened
8/26/2012	1:28:16 PM	Main Vac valve opened
8/26/2012	1:28:16 PM	Helium MFC set to  20.000000
8/26/2012	1:28:16 PM	H2 MFC set to  0.000000
8/26/2012	1:28:16 PM	BCl3 MFC set to  0.000000
8/26/2012	1:28:16 PM	PH3 MFC set to  0.000000
8/26/2012	1:28:16 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:28:16 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:28:17 PM	Tube furnace set to 150
8/26/2012	1:28:47 PM	Helium valve closed
8/26/2012	1:28:47 PM	H2 valve closed
8/26/2012	1:28:47 PM	BCl3 valve closed
8/26/2012	1:28:47 PM	PH3 valve closed
8/26/2012	1:28:47 PM	SiCl4 pre valve closed
8/26/2012	1:28:47 PM	SiCl4 post valve closed
8/26/2012	1:28:47 PM	Bypass valve closed
8/26/2012	1:28:47 PM	Bubbler valve closed
8/26/2012	1:28:47 PM	Main Vac valve opened
8/26/2012	1:28:47 PM	Helium MFC set to  0.000000
8/26/2012	1:28:47 PM	H2 MFC set to  0.000000
8/26/2012	1:28:47 PM	BCl3 MFC set to  0.000000
8/26/2012	1:28:47 PM	PH3 MFC set to  0.000000
8/26/2012	1:28:47 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:28:47 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:28:47 PM	Tube furnace set to 150
8/26/2012	1:29:17 PM	H2 valve closed
8/26/2012	1:29:17 PM	BCl3 valve closed
8/26/2012	1:29:17 PM	PH3 valve closed
8/26/2012	1:29:17 PM	SiCl4 pre valve closed
8/26/2012	1:29:17 PM	SiCl4 post valve closed
8/26/2012	1:29:17 PM	Bypass valve closed
8/26/2012	1:29:17 PM	Bubbler valve closed
8/26/2012	1:29:17 PM	Helium valve opened
8/26/2012	1:29:17 PM	Main Vac valve opened
8/26/2012	1:29:17 PM	Helium MFC set to  20.000000
8/26/2012	1:29:17 PM	H2 MFC set to  0.000000
8/26/2012	1:29:17 PM	BCl3 MFC set to  0.000000
8/26/2012	1:29:17 PM	PH3 MFC set to  0.000000
8/26/2012	1:29:17 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:29:17 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:29:17 PM	Tube furnace set to 150
8/26/2012	1:29:47 PM	Helium valve closed
8/26/2012	1:29:47 PM	H2 valve closed
8/26/2012	1:29:47 PM	BCl3 valve closed
8/26/2012	1:29:47 PM	PH3 valve closed
8/26/2012	1:29:47 PM	SiCl4 pre valve closed
8/26/2012	1:29:47 PM	SiCl4 post valve closed
8/26/2012	1:29:47 PM	Bypass valve closed
8/26/2012	1:29:47 PM	Bubbler valve closed
8/26/2012	1:29:47 PM	Main Vac valve opened
8/26/2012	1:29:47 PM	Helium MFC set to  0.000000
8/26/2012	1:29:47 PM	H2 MFC set to  0.000000
8/26/2012	1:29:47 PM	BCl3 MFC set to  0.000000
8/26/2012	1:29:47 PM	PH3 MFC set to  0.000000
8/26/2012	1:29:47 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:29:47 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:29:47 PM	Tube furnace set to 150
8/26/2012	1:30:17 PM	H2 valve closed
8/26/2012	1:30:17 PM	BCl3 valve closed
8/26/2012	1:30:17 PM	PH3 valve closed
8/26/2012	1:30:17 PM	SiCl4 pre valve closed
8/26/2012	1:30:17 PM	SiCl4 post valve closed
8/26/2012	1:30:17 PM	Bypass valve closed
8/26/2012	1:30:17 PM	Bubbler valve closed
8/26/2012	1:30:17 PM	Helium valve opened
8/26/2012	1:30:17 PM	Main Vac valve opened
8/26/2012	1:30:17 PM	Helium MFC set to  20.000000
8/26/2012	1:30:17 PM	H2 MFC set to  0.000000
8/26/2012	1:30:17 PM	BCl3 MFC set to  0.000000
8/26/2012	1:30:17 PM	PH3 MFC set to  0.000000
8/26/2012	1:30:17 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:30:17 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:30:18 PM	Tube furnace set to 150
8/26/2012	1:30:48 PM	Helium valve closed
8/26/2012	1:30:48 PM	H2 valve closed
8/26/2012	1:30:48 PM	BCl3 valve closed
8/26/2012	1:30:48 PM	PH3 valve closed
8/26/2012	1:30:48 PM	SiCl4 pre valve closed
8/26/2012	1:30:48 PM	SiCl4 post valve closed
8/26/2012	1:30:48 PM	Bypass valve closed
8/26/2012	1:30:48 PM	Bubbler valve closed
8/26/2012	1:30:48 PM	Main Vac valve opened
8/26/2012	1:30:48 PM	Helium MFC set to  0.000000
8/26/2012	1:30:48 PM	H2 MFC set to  0.000000
8/26/2012	1:30:48 PM	BCl3 MFC set to  0.000000
8/26/2012	1:30:48 PM	PH3 MFC set to  0.000000
8/26/2012	1:30:48 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:30:48 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:30:48 PM	Tube furnace set to 150
8/26/2012	1:31:18 PM	H2 valve closed
8/26/2012	1:31:18 PM	BCl3 valve closed
8/26/2012	1:31:18 PM	PH3 valve closed
8/26/2012	1:31:18 PM	SiCl4 pre valve closed
8/26/2012	1:31:18 PM	SiCl4 post valve closed
8/26/2012	1:31:18 PM	Bypass valve closed
8/26/2012	1:31:18 PM	Bubbler valve closed
8/26/2012	1:31:18 PM	Helium valve opened
8/26/2012	1:31:18 PM	Main Vac valve opened
8/26/2012	1:31:18 PM	Helium MFC set to  20.000000
8/26/2012	1:31:18 PM	H2 MFC set to  0.000000
8/26/2012	1:31:18 PM	BCl3 MFC set to  0.000000
8/26/2012	1:31:18 PM	PH3 MFC set to  0.000000
8/26/2012	1:31:18 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:31:18 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:31:18 PM	Tube furnace set to 150
8/26/2012	1:31:48 PM	Helium valve closed
8/26/2012	1:31:48 PM	H2 valve closed
8/26/2012	1:31:48 PM	BCl3 valve closed
8/26/2012	1:31:48 PM	PH3 valve closed
8/26/2012	1:31:48 PM	SiCl4 pre valve closed
8/26/2012	1:31:48 PM	SiCl4 post valve closed
8/26/2012	1:31:48 PM	Bypass valve closed
8/26/2012	1:31:48 PM	Bubbler valve closed
8/26/2012	1:31:48 PM	Main Vac valve opened
8/26/2012	1:31:48 PM	Helium MFC set to  0.000000
8/26/2012	1:31:48 PM	H2 MFC set to  0.000000
8/26/2012	1:31:48 PM	BCl3 MFC set to  0.000000
8/26/2012	1:31:48 PM	PH3 MFC set to  0.000000
8/26/2012	1:31:48 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:31:48 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:31:48 PM	Tube furnace set to 150
8/26/2012	1:32:18 PM	H2 valve closed
8/26/2012	1:32:18 PM	BCl3 valve closed
8/26/2012	1:32:18 PM	PH3 valve closed
8/26/2012	1:32:18 PM	SiCl4 pre valve closed
8/26/2012	1:32:18 PM	SiCl4 post valve closed
8/26/2012	1:32:18 PM	Bypass valve closed
8/26/2012	1:32:18 PM	Bubbler valve closed
8/26/2012	1:32:18 PM	Helium valve opened
8/26/2012	1:32:18 PM	Main Vac valve opened
8/26/2012	1:32:18 PM	Helium MFC set to  20.000000
8/26/2012	1:32:18 PM	H2 MFC set to  0.000000
8/26/2012	1:32:18 PM	BCl3 MFC set to  0.000000
8/26/2012	1:32:18 PM	PH3 MFC set to  0.000000
8/26/2012	1:32:18 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:32:18 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:32:19 PM	Tube furnace set to 150
8/26/2012	1:32:49 PM	Helium valve closed
8/26/2012	1:32:49 PM	H2 valve closed
8/26/2012	1:32:49 PM	BCl3 valve closed
8/26/2012	1:32:49 PM	PH3 valve closed
8/26/2012	1:32:49 PM	SiCl4 pre valve closed
8/26/2012	1:32:49 PM	SiCl4 post valve closed
8/26/2012	1:32:49 PM	Bypass valve closed
8/26/2012	1:32:49 PM	Bubbler valve closed
8/26/2012	1:32:49 PM	Main Vac valve opened
8/26/2012	1:32:49 PM	Helium MFC set to  0.000000
8/26/2012	1:32:49 PM	H2 MFC set to  0.000000
8/26/2012	1:32:49 PM	BCl3 MFC set to  0.000000
8/26/2012	1:32:49 PM	PH3 MFC set to  0.000000
8/26/2012	1:32:49 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:32:49 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:32:49 PM	Tube furnace set to 150
8/26/2012	1:33:19 PM	H2 valve closed
8/26/2012	1:33:19 PM	BCl3 valve closed
8/26/2012	1:33:19 PM	PH3 valve closed
8/26/2012	1:33:19 PM	SiCl4 pre valve closed
8/26/2012	1:33:19 PM	SiCl4 post valve closed
8/26/2012	1:33:19 PM	Bypass valve closed
8/26/2012	1:33:19 PM	Bubbler valve closed
8/26/2012	1:33:19 PM	Helium valve opened
8/26/2012	1:33:19 PM	Main Vac valve opened
8/26/2012	1:33:19 PM	Helium MFC set to  20.000000
8/26/2012	1:33:19 PM	H2 MFC set to  0.000000
8/26/2012	1:33:19 PM	BCl3 MFC set to  0.000000
8/26/2012	1:33:19 PM	PH3 MFC set to  0.000000
8/26/2012	1:33:19 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:33:19 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:33:19 PM	Tube furnace set to 150
8/26/2012	1:33:49 PM	Helium valve closed
8/26/2012	1:33:49 PM	H2 valve closed
8/26/2012	1:33:49 PM	BCl3 valve closed
8/26/2012	1:33:49 PM	PH3 valve closed
8/26/2012	1:33:49 PM	SiCl4 pre valve closed
8/26/2012	1:33:49 PM	SiCl4 post valve closed
8/26/2012	1:33:49 PM	Bypass valve closed
8/26/2012	1:33:49 PM	Bubbler valve closed
8/26/2012	1:33:49 PM	Main Vac valve opened
8/26/2012	1:33:49 PM	Helium MFC set to  0.000000
8/26/2012	1:33:49 PM	H2 MFC set to  0.000000
8/26/2012	1:33:49 PM	BCl3 MFC set to  0.000000
8/26/2012	1:33:49 PM	PH3 MFC set to  0.000000
8/26/2012	1:33:49 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:33:49 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:33:49 PM	Tube furnace set to 150
8/26/2012	1:33:50 PM	Run finished at 1:33 PM
8/26/2012	1:41:00 PM	Recipe started at 1:40 PM
8/26/2012	1:41:00 PM	Helium valve closed
8/26/2012	1:41:00 PM	H2 valve closed
8/26/2012	1:41:00 PM	BCl3 valve closed
8/26/2012	1:41:00 PM	PH3 valve closed
8/26/2012	1:41:00 PM	SiCl4 pre valve closed
8/26/2012	1:41:00 PM	SiCl4 post valve closed
8/26/2012	1:41:00 PM	Bypass valve closed
8/26/2012	1:41:00 PM	Bubbler valve closed
8/26/2012	1:41:00 PM	Main Vac valve opened
8/26/2012	1:41:00 PM	Helium MFC set to  0.000000
8/26/2012	1:41:00 PM	H2 MFC set to  0.000000
8/26/2012	1:41:00 PM	BCl3 MFC set to  0.000000
8/26/2012	1:41:00 PM	PH3 MFC set to  0.000000
8/26/2012	1:41:00 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:41:00 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:41:00 PM	Tube furnace set to 150
8/26/2012	1:41:02 PM	H2 valve closed
8/26/2012	1:41:02 PM	BCl3 valve closed
8/26/2012	1:41:02 PM	PH3 valve closed
8/26/2012	1:41:02 PM	SiCl4 pre valve closed
8/26/2012	1:41:02 PM	SiCl4 post valve closed
8/26/2012	1:41:02 PM	Bypass valve closed
8/26/2012	1:41:02 PM	Bubbler valve closed
8/26/2012	1:41:02 PM	Helium valve opened
8/26/2012	1:41:02 PM	Main Vac valve opened
8/26/2012	1:41:02 PM	Helium MFC set to  20.000000
8/26/2012	1:41:03 PM	H2 MFC set to  0.000000
8/26/2012	1:41:03 PM	BCl3 MFC set to  0.000000
8/26/2012	1:41:03 PM	PH3 MFC set to  0.000000
8/26/2012	1:41:03 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:41:03 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:41:03 PM	Tube furnace set to 150
8/26/2012	1:41:33 PM	Helium valve closed
8/26/2012	1:41:33 PM	H2 valve closed
8/26/2012	1:41:33 PM	BCl3 valve closed
8/26/2012	1:41:33 PM	PH3 valve closed
8/26/2012	1:41:33 PM	SiCl4 pre valve closed
8/26/2012	1:41:33 PM	SiCl4 post valve closed
8/26/2012	1:41:33 PM	Bypass valve closed
8/26/2012	1:41:33 PM	Bubbler valve closed
8/26/2012	1:41:33 PM	Main Vac valve opened
8/26/2012	1:41:33 PM	Helium MFC set to  0.000000
8/26/2012	1:41:33 PM	H2 MFC set to  0.000000
8/26/2012	1:41:33 PM	BCl3 MFC set to  0.000000
8/26/2012	1:41:33 PM	PH3 MFC set to  0.000000
8/26/2012	1:41:33 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:41:33 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:41:33 PM	Tube furnace set to 150
8/26/2012	1:42:03 PM	H2 valve closed
8/26/2012	1:42:03 PM	BCl3 valve closed
8/26/2012	1:42:03 PM	PH3 valve closed
8/26/2012	1:42:03 PM	SiCl4 pre valve closed
8/26/2012	1:42:03 PM	SiCl4 post valve closed
8/26/2012	1:42:03 PM	Bypass valve closed
8/26/2012	1:42:03 PM	Bubbler valve closed
8/26/2012	1:42:03 PM	Helium valve opened
8/26/2012	1:42:03 PM	Main Vac valve opened
8/26/2012	1:42:03 PM	Helium MFC set to  20.000000
8/26/2012	1:42:03 PM	H2 MFC set to  0.000000
8/26/2012	1:42:03 PM	BCl3 MFC set to  0.000000
8/26/2012	1:42:03 PM	PH3 MFC set to  0.000000
8/26/2012	1:42:03 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:42:03 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:42:03 PM	Tube furnace set to 150
8/26/2012	1:42:33 PM	Helium valve closed
8/26/2012	1:42:33 PM	H2 valve closed
8/26/2012	1:42:33 PM	BCl3 valve closed
8/26/2012	1:42:33 PM	PH3 valve closed
8/26/2012	1:42:33 PM	SiCl4 pre valve closed
8/26/2012	1:42:33 PM	SiCl4 post valve closed
8/26/2012	1:42:33 PM	Bypass valve closed
8/26/2012	1:42:33 PM	Bubbler valve closed
8/26/2012	1:42:33 PM	Main Vac valve opened
8/26/2012	1:42:33 PM	Helium MFC set to  0.000000
8/26/2012	1:42:33 PM	H2 MFC set to  0.000000
8/26/2012	1:42:33 PM	BCl3 MFC set to  0.000000
8/26/2012	1:42:33 PM	PH3 MFC set to  0.000000
8/26/2012	1:42:33 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:42:33 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:42:33 PM	Tube furnace set to 150
8/26/2012	1:43:03 PM	H2 valve closed
8/26/2012	1:43:03 PM	BCl3 valve closed
8/26/2012	1:43:03 PM	PH3 valve closed
8/26/2012	1:43:03 PM	SiCl4 pre valve closed
8/26/2012	1:43:03 PM	SiCl4 post valve closed
8/26/2012	1:43:03 PM	Bypass valve closed
8/26/2012	1:43:03 PM	Bubbler valve closed
8/26/2012	1:43:03 PM	Helium valve opened
8/26/2012	1:43:03 PM	Main Vac valve opened
8/26/2012	1:43:03 PM	Helium MFC set to  20.000000
8/26/2012	1:43:03 PM	H2 MFC set to  0.000000
8/26/2012	1:43:03 PM	BCl3 MFC set to  0.000000
8/26/2012	1:43:03 PM	PH3 MFC set to  0.000000
8/26/2012	1:43:03 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:43:03 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:43:04 PM	Tube furnace set to 150
8/26/2012	1:43:34 PM	Helium valve closed
8/26/2012	1:43:34 PM	H2 valve closed
8/26/2012	1:43:34 PM	BCl3 valve closed
8/26/2012	1:43:34 PM	PH3 valve closed
8/26/2012	1:43:34 PM	SiCl4 pre valve closed
8/26/2012	1:43:34 PM	SiCl4 post valve closed
8/26/2012	1:43:34 PM	Bypass valve closed
8/26/2012	1:43:34 PM	Bubbler valve closed
8/26/2012	1:43:34 PM	Main Vac valve opened
8/26/2012	1:43:34 PM	Helium MFC set to  0.000000
8/26/2012	1:43:34 PM	H2 MFC set to  0.000000
8/26/2012	1:43:34 PM	BCl3 MFC set to  0.000000
8/26/2012	1:43:34 PM	PH3 MFC set to  0.000000
8/26/2012	1:43:34 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:43:34 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:43:34 PM	Tube furnace set to 150
8/26/2012	1:44:04 PM	H2 valve closed
8/26/2012	1:44:04 PM	BCl3 valve closed
8/26/2012	1:44:04 PM	PH3 valve closed
8/26/2012	1:44:04 PM	SiCl4 pre valve closed
8/26/2012	1:44:04 PM	SiCl4 post valve closed
8/26/2012	1:44:04 PM	Bypass valve closed
8/26/2012	1:44:04 PM	Bubbler valve closed
8/26/2012	1:44:04 PM	Helium valve opened
8/26/2012	1:44:04 PM	Main Vac valve opened
8/26/2012	1:44:04 PM	Helium MFC set to  20.000000
8/26/2012	1:44:04 PM	H2 MFC set to  0.000000
8/26/2012	1:44:04 PM	BCl3 MFC set to  0.000000
8/26/2012	1:44:04 PM	PH3 MFC set to  0.000000
8/26/2012	1:44:04 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:44:04 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:44:04 PM	Tube furnace set to 150
8/26/2012	1:44:34 PM	Helium valve closed
8/26/2012	1:44:34 PM	H2 valve closed
8/26/2012	1:44:34 PM	BCl3 valve closed
8/26/2012	1:44:34 PM	PH3 valve closed
8/26/2012	1:44:34 PM	SiCl4 pre valve closed
8/26/2012	1:44:34 PM	SiCl4 post valve closed
8/26/2012	1:44:34 PM	Bypass valve closed
8/26/2012	1:44:34 PM	Bubbler valve closed
8/26/2012	1:44:34 PM	Main Vac valve opened
8/26/2012	1:44:34 PM	Helium MFC set to  0.000000
8/26/2012	1:44:34 PM	H2 MFC set to  0.000000
8/26/2012	1:44:34 PM	BCl3 MFC set to  0.000000
8/26/2012	1:44:34 PM	PH3 MFC set to  0.000000
8/26/2012	1:44:34 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:44:34 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:44:34 PM	Tube furnace set to 150
8/26/2012	1:45:04 PM	H2 valve closed
8/26/2012	1:45:04 PM	BCl3 valve closed
8/26/2012	1:45:04 PM	PH3 valve closed
8/26/2012	1:45:04 PM	SiCl4 pre valve closed
8/26/2012	1:45:04 PM	SiCl4 post valve closed
8/26/2012	1:45:04 PM	Bypass valve closed
8/26/2012	1:45:04 PM	Bubbler valve closed
8/26/2012	1:45:04 PM	Helium valve opened
8/26/2012	1:45:04 PM	Main Vac valve opened
8/26/2012	1:45:04 PM	Helium MFC set to  20.000000
8/26/2012	1:45:04 PM	H2 MFC set to  0.000000
8/26/2012	1:45:04 PM	BCl3 MFC set to  0.000000
8/26/2012	1:45:04 PM	PH3 MFC set to  0.000000
8/26/2012	1:45:04 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:45:04 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:45:05 PM	Tube furnace set to 150
8/26/2012	1:45:35 PM	Helium valve closed
8/26/2012	1:45:35 PM	H2 valve closed
8/26/2012	1:45:35 PM	BCl3 valve closed
8/26/2012	1:45:35 PM	PH3 valve closed
8/26/2012	1:45:35 PM	SiCl4 pre valve closed
8/26/2012	1:45:35 PM	SiCl4 post valve closed
8/26/2012	1:45:35 PM	Bypass valve closed
8/26/2012	1:45:35 PM	Bubbler valve closed
8/26/2012	1:45:35 PM	Main Vac valve opened
8/26/2012	1:45:35 PM	Helium MFC set to  0.000000
8/26/2012	1:45:35 PM	H2 MFC set to  0.000000
8/26/2012	1:45:35 PM	BCl3 MFC set to  0.000000
8/26/2012	1:45:35 PM	PH3 MFC set to  0.000000
8/26/2012	1:45:35 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:45:35 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:45:35 PM	Tube furnace set to 150
8/26/2012	1:46:05 PM	H2 valve closed
8/26/2012	1:46:05 PM	BCl3 valve closed
8/26/2012	1:46:05 PM	PH3 valve closed
8/26/2012	1:46:05 PM	SiCl4 pre valve closed
8/26/2012	1:46:05 PM	SiCl4 post valve closed
8/26/2012	1:46:05 PM	Bypass valve closed
8/26/2012	1:46:05 PM	Bubbler valve closed
8/26/2012	1:46:05 PM	Helium valve opened
8/26/2012	1:46:05 PM	Main Vac valve opened
8/26/2012	1:46:05 PM	Helium MFC set to  20.000000
8/26/2012	1:46:05 PM	H2 MFC set to  0.000000
8/26/2012	1:46:05 PM	BCl3 MFC set to  0.000000
8/26/2012	1:46:05 PM	PH3 MFC set to  0.000000
8/26/2012	1:46:05 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:46:05 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:46:05 PM	Tube furnace set to 150
8/26/2012	1:46:35 PM	Helium valve closed
8/26/2012	1:46:35 PM	H2 valve closed
8/26/2012	1:46:35 PM	BCl3 valve closed
8/26/2012	1:46:35 PM	PH3 valve closed
8/26/2012	1:46:35 PM	SiCl4 pre valve closed
8/26/2012	1:46:35 PM	SiCl4 post valve closed
8/26/2012	1:46:35 PM	Bypass valve closed
8/26/2012	1:46:35 PM	Bubbler valve closed
8/26/2012	1:46:35 PM	Main Vac valve opened
8/26/2012	1:46:35 PM	Helium MFC set to  0.000000
8/26/2012	1:46:35 PM	H2 MFC set to  0.000000
8/26/2012	1:46:35 PM	BCl3 MFC set to  0.000000
8/26/2012	1:46:35 PM	PH3 MFC set to  0.000000
8/26/2012	1:46:35 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:46:35 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:46:35 PM	Tube furnace set to 150
8/26/2012	1:47:05 PM	H2 valve closed
8/26/2012	1:47:05 PM	BCl3 valve closed
8/26/2012	1:47:05 PM	PH3 valve closed
8/26/2012	1:47:05 PM	SiCl4 pre valve closed
8/26/2012	1:47:05 PM	SiCl4 post valve closed
8/26/2012	1:47:05 PM	Bypass valve closed
8/26/2012	1:47:05 PM	Bubbler valve closed
8/26/2012	1:47:05 PM	Helium valve opened
8/26/2012	1:47:05 PM	Main Vac valve opened
8/26/2012	1:47:05 PM	Helium MFC set to  20.000000
8/26/2012	1:47:05 PM	H2 MFC set to  0.000000
8/26/2012	1:47:05 PM	BCl3 MFC set to  0.000000
8/26/2012	1:47:05 PM	PH3 MFC set to  0.000000
8/26/2012	1:47:05 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:47:05 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:47:06 PM	Tube furnace set to 150
8/26/2012	1:47:36 PM	Helium valve closed
8/26/2012	1:47:36 PM	H2 valve closed
8/26/2012	1:47:36 PM	BCl3 valve closed
8/26/2012	1:47:36 PM	PH3 valve closed
8/26/2012	1:47:36 PM	SiCl4 pre valve closed
8/26/2012	1:47:36 PM	SiCl4 post valve closed
8/26/2012	1:47:36 PM	Bypass valve closed
8/26/2012	1:47:36 PM	Bubbler valve closed
8/26/2012	1:47:36 PM	Main Vac valve opened
8/26/2012	1:47:36 PM	Helium MFC set to  0.000000
8/26/2012	1:47:36 PM	H2 MFC set to  0.000000
8/26/2012	1:47:36 PM	BCl3 MFC set to  0.000000
8/26/2012	1:47:36 PM	PH3 MFC set to  0.000000
8/26/2012	1:47:36 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:47:36 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:47:36 PM	Tube furnace set to 150
8/26/2012	1:48:06 PM	H2 valve closed
8/26/2012	1:48:06 PM	BCl3 valve closed
8/26/2012	1:48:06 PM	PH3 valve closed
8/26/2012	1:48:06 PM	SiCl4 pre valve closed
8/26/2012	1:48:06 PM	SiCl4 post valve closed
8/26/2012	1:48:06 PM	Bypass valve closed
8/26/2012	1:48:06 PM	Bubbler valve closed
8/26/2012	1:48:06 PM	Helium valve opened
8/26/2012	1:48:06 PM	Main Vac valve opened
8/26/2012	1:48:06 PM	Helium MFC set to  20.000000
8/26/2012	1:48:06 PM	H2 MFC set to  0.000000
8/26/2012	1:48:06 PM	BCl3 MFC set to  0.000000
8/26/2012	1:48:06 PM	PH3 MFC set to  0.000000
8/26/2012	1:48:06 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:48:06 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:48:06 PM	Tube furnace set to 150
8/26/2012	1:48:36 PM	Helium valve closed
8/26/2012	1:48:36 PM	H2 valve closed
8/26/2012	1:48:36 PM	BCl3 valve closed
8/26/2012	1:48:36 PM	PH3 valve closed
8/26/2012	1:48:36 PM	SiCl4 pre valve closed
8/26/2012	1:48:36 PM	SiCl4 post valve closed
8/26/2012	1:48:36 PM	Bypass valve closed
8/26/2012	1:48:36 PM	Bubbler valve closed
8/26/2012	1:48:36 PM	Main Vac valve opened
8/26/2012	1:48:36 PM	Helium MFC set to  0.000000
8/26/2012	1:48:36 PM	H2 MFC set to  0.000000
8/26/2012	1:48:36 PM	BCl3 MFC set to  0.000000
8/26/2012	1:48:36 PM	PH3 MFC set to  0.000000
8/26/2012	1:48:36 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:48:36 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:48:36 PM	Tube furnace set to 150
8/26/2012	1:49:06 PM	H2 valve closed
8/26/2012	1:49:06 PM	BCl3 valve closed
8/26/2012	1:49:06 PM	PH3 valve closed
8/26/2012	1:49:06 PM	SiCl4 pre valve closed
8/26/2012	1:49:06 PM	SiCl4 post valve closed
8/26/2012	1:49:06 PM	Bypass valve closed
8/26/2012	1:49:06 PM	Bubbler valve closed
8/26/2012	1:49:06 PM	Helium valve opened
8/26/2012	1:49:06 PM	Main Vac valve opened
8/26/2012	1:49:06 PM	Helium MFC set to  20.000000
8/26/2012	1:49:06 PM	H2 MFC set to  0.000000
8/26/2012	1:49:06 PM	BCl3 MFC set to  0.000000
8/26/2012	1:49:06 PM	PH3 MFC set to  0.000000
8/26/2012	1:49:06 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:49:06 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:49:06 PM	Tube furnace set to 150
8/26/2012	1:49:36 PM	Helium valve closed
8/26/2012	1:49:36 PM	H2 valve closed
8/26/2012	1:49:37 PM	BCl3 valve closed
8/26/2012	1:49:37 PM	PH3 valve closed
8/26/2012	1:49:37 PM	SiCl4 pre valve closed
8/26/2012	1:49:37 PM	SiCl4 post valve closed
8/26/2012	1:49:37 PM	Bypass valve closed
8/26/2012	1:49:37 PM	Bubbler valve closed
8/26/2012	1:49:37 PM	Main Vac valve opened
8/26/2012	1:49:37 PM	Helium MFC set to  0.000000
8/26/2012	1:49:37 PM	H2 MFC set to  0.000000
8/26/2012	1:49:37 PM	BCl3 MFC set to  0.000000
8/26/2012	1:49:37 PM	PH3 MFC set to  0.000000
8/26/2012	1:49:37 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:49:37 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:49:37 PM	Tube furnace set to 150
8/26/2012	1:50:07 PM	H2 valve closed
8/26/2012	1:50:07 PM	BCl3 valve closed
8/26/2012	1:50:07 PM	PH3 valve closed
8/26/2012	1:50:07 PM	SiCl4 pre valve closed
8/26/2012	1:50:07 PM	SiCl4 post valve closed
8/26/2012	1:50:07 PM	Bypass valve closed
8/26/2012	1:50:07 PM	Bubbler valve closed
8/26/2012	1:50:07 PM	Helium valve opened
8/26/2012	1:50:07 PM	Main Vac valve opened
8/26/2012	1:50:07 PM	Helium MFC set to  20.000000
8/26/2012	1:50:07 PM	H2 MFC set to  0.000000
8/26/2012	1:50:07 PM	BCl3 MFC set to  0.000000
8/26/2012	1:50:07 PM	PH3 MFC set to  0.000000
8/26/2012	1:50:07 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:50:07 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:50:07 PM	Tube furnace set to 150
8/26/2012	1:50:37 PM	Helium valve closed
8/26/2012	1:50:37 PM	H2 valve closed
8/26/2012	1:50:37 PM	BCl3 valve closed
8/26/2012	1:50:37 PM	PH3 valve closed
8/26/2012	1:50:37 PM	SiCl4 pre valve closed
8/26/2012	1:50:37 PM	SiCl4 post valve closed
8/26/2012	1:50:37 PM	Bypass valve closed
8/26/2012	1:50:37 PM	Bubbler valve closed
8/26/2012	1:50:37 PM	Main Vac valve opened
8/26/2012	1:50:37 PM	Helium MFC set to  0.000000
8/26/2012	1:50:37 PM	H2 MFC set to  0.000000
8/26/2012	1:50:37 PM	BCl3 MFC set to  0.000000
8/26/2012	1:50:37 PM	PH3 MFC set to  0.000000
8/26/2012	1:50:37 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:50:37 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:50:37 PM	Tube furnace set to 150
8/26/2012	1:50:38 PM	Run finished at 1:50 PM
8/26/2012	1:51:41 PM	Recipe started at 1:51 PM
8/26/2012	1:51:41 PM	Helium valve closed
8/26/2012	1:51:41 PM	H2 valve closed
8/26/2012	1:51:41 PM	BCl3 valve closed
8/26/2012	1:51:41 PM	PH3 valve closed
8/26/2012	1:51:41 PM	SiCl4 pre valve closed
8/26/2012	1:51:41 PM	SiCl4 post valve closed
8/26/2012	1:51:41 PM	Bypass valve closed
8/26/2012	1:51:41 PM	Bubbler valve closed
8/26/2012	1:51:41 PM	Main Vac valve opened
8/26/2012	1:51:41 PM	Helium MFC set to  0.000000
8/26/2012	1:51:41 PM	H2 MFC set to  0.000000
8/26/2012	1:51:41 PM	BCl3 MFC set to  0.000000
8/26/2012	1:51:41 PM	PH3 MFC set to  0.000000
8/26/2012	1:51:41 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:51:41 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:51:41 PM	Tube furnace set to 150
8/26/2012	1:52:11 PM	H2 valve closed
8/26/2012	1:52:11 PM	BCl3 valve closed
8/26/2012	1:52:11 PM	PH3 valve closed
8/26/2012	1:52:11 PM	SiCl4 pre valve closed
8/26/2012	1:52:11 PM	SiCl4 post valve closed
8/26/2012	1:52:11 PM	Bypass valve closed
8/26/2012	1:52:11 PM	Bubbler valve closed
8/26/2012	1:52:11 PM	Helium valve opened
8/26/2012	1:52:11 PM	Main Vac valve opened
8/26/2012	1:52:11 PM	Helium MFC set to  20.000000
8/26/2012	1:52:11 PM	H2 MFC set to  0.000000
8/26/2012	1:52:11 PM	BCl3 MFC set to  0.000000
8/26/2012	1:52:11 PM	PH3 MFC set to  0.000000
8/26/2012	1:52:11 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:52:11 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:52:11 PM	Tube furnace set to 150
8/26/2012	1:52:41 PM	Helium valve closed
8/26/2012	1:52:41 PM	H2 valve closed
8/26/2012	1:52:41 PM	BCl3 valve closed
8/26/2012	1:52:41 PM	PH3 valve closed
8/26/2012	1:52:41 PM	SiCl4 pre valve closed
8/26/2012	1:52:41 PM	SiCl4 post valve closed
8/26/2012	1:52:41 PM	Bypass valve closed
8/26/2012	1:52:41 PM	Bubbler valve closed
8/26/2012	1:52:41 PM	Main Vac valve opened
8/26/2012	1:52:41 PM	Helium MFC set to  0.000000
8/26/2012	1:52:41 PM	H2 MFC set to  0.000000
8/26/2012	1:52:41 PM	BCl3 MFC set to  0.000000
8/26/2012	1:52:41 PM	PH3 MFC set to  0.000000
8/26/2012	1:52:41 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:52:41 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:52:42 PM	Tube furnace set to 150
8/26/2012	1:53:12 PM	H2 valve closed
8/26/2012	1:53:12 PM	BCl3 valve closed
8/26/2012	1:53:12 PM	PH3 valve closed
8/26/2012	1:53:12 PM	SiCl4 pre valve closed
8/26/2012	1:53:12 PM	SiCl4 post valve closed
8/26/2012	1:53:12 PM	Bypass valve closed
8/26/2012	1:53:12 PM	Bubbler valve closed
8/26/2012	1:53:12 PM	Helium valve opened
8/26/2012	1:53:12 PM	Main Vac valve opened
8/26/2012	1:53:12 PM	Helium MFC set to  20.000000
8/26/2012	1:53:12 PM	H2 MFC set to  0.000000
8/26/2012	1:53:12 PM	BCl3 MFC set to  0.000000
8/26/2012	1:53:12 PM	PH3 MFC set to  0.000000
8/26/2012	1:53:12 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:53:12 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:53:12 PM	Tube furnace set to 150
8/26/2012	1:53:42 PM	Helium valve closed
8/26/2012	1:53:42 PM	H2 valve closed
8/26/2012	1:53:42 PM	BCl3 valve closed
8/26/2012	1:53:42 PM	PH3 valve closed
8/26/2012	1:53:42 PM	SiCl4 pre valve closed
8/26/2012	1:53:42 PM	SiCl4 post valve closed
8/26/2012	1:53:42 PM	Bypass valve closed
8/26/2012	1:53:42 PM	Bubbler valve closed
8/26/2012	1:53:42 PM	Main Vac valve opened
8/26/2012	1:53:42 PM	Helium MFC set to  0.000000
8/26/2012	1:53:42 PM	H2 MFC set to  0.000000
8/26/2012	1:53:42 PM	BCl3 MFC set to  0.000000
8/26/2012	1:53:42 PM	PH3 MFC set to  0.000000
8/26/2012	1:53:42 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:53:42 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:53:42 PM	Tube furnace set to 150
8/26/2012	1:54:12 PM	H2 valve closed
8/26/2012	1:54:12 PM	BCl3 valve closed
8/26/2012	1:54:12 PM	PH3 valve closed
8/26/2012	1:54:12 PM	SiCl4 pre valve closed
8/26/2012	1:54:12 PM	SiCl4 post valve closed
8/26/2012	1:54:12 PM	Bypass valve closed
8/26/2012	1:54:12 PM	Bubbler valve closed
8/26/2012	1:54:12 PM	Helium valve opened
8/26/2012	1:54:12 PM	Main Vac valve opened
8/26/2012	1:54:12 PM	Helium MFC set to  20.000000
8/26/2012	1:54:12 PM	H2 MFC set to  0.000000
8/26/2012	1:54:12 PM	BCl3 MFC set to  0.000000
8/26/2012	1:54:12 PM	PH3 MFC set to  0.000000
8/26/2012	1:54:12 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:54:12 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:54:12 PM	Tube furnace set to 150
8/26/2012	1:54:42 PM	Helium valve closed
8/26/2012	1:54:42 PM	H2 valve closed
8/26/2012	1:54:42 PM	BCl3 valve closed
8/26/2012	1:54:42 PM	PH3 valve closed
8/26/2012	1:54:42 PM	SiCl4 pre valve closed
8/26/2012	1:54:42 PM	SiCl4 post valve closed
8/26/2012	1:54:42 PM	Bypass valve closed
8/26/2012	1:54:42 PM	Bubbler valve closed
8/26/2012	1:54:42 PM	Main Vac valve opened
8/26/2012	1:54:42 PM	Helium MFC set to  0.000000
8/26/2012	1:54:42 PM	H2 MFC set to  0.000000
8/26/2012	1:54:42 PM	BCl3 MFC set to  0.000000
8/26/2012	1:54:42 PM	PH3 MFC set to  0.000000
8/26/2012	1:54:42 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:54:42 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:54:42 PM	Tube furnace set to 150
8/26/2012	1:55:12 PM	H2 valve closed
8/26/2012	1:55:12 PM	BCl3 valve closed
8/26/2012	1:55:12 PM	PH3 valve closed
8/26/2012	1:55:12 PM	SiCl4 pre valve closed
8/26/2012	1:55:12 PM	SiCl4 post valve closed
8/26/2012	1:55:12 PM	Bypass valve closed
8/26/2012	1:55:13 PM	Bubbler valve closed
8/26/2012	1:55:13 PM	Helium valve opened
8/26/2012	1:55:13 PM	Main Vac valve opened
8/26/2012	1:55:13 PM	Helium MFC set to  20.000000
8/26/2012	1:55:13 PM	H2 MFC set to  0.000000
8/26/2012	1:55:13 PM	BCl3 MFC set to  0.000000
8/26/2012	1:55:13 PM	PH3 MFC set to  0.000000
8/26/2012	1:55:13 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:55:13 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:55:13 PM	Tube furnace set to 150
8/26/2012	1:55:43 PM	Helium valve closed
8/26/2012	1:55:43 PM	H2 valve closed
8/26/2012	1:55:43 PM	BCl3 valve closed
8/26/2012	1:55:43 PM	PH3 valve closed
8/26/2012	1:55:43 PM	SiCl4 pre valve closed
8/26/2012	1:55:43 PM	SiCl4 post valve closed
8/26/2012	1:55:43 PM	Bypass valve closed
8/26/2012	1:55:43 PM	Bubbler valve closed
8/26/2012	1:55:43 PM	Main Vac valve opened
8/26/2012	1:55:43 PM	Helium MFC set to  0.000000
8/26/2012	1:55:43 PM	H2 MFC set to  0.000000
8/26/2012	1:55:43 PM	BCl3 MFC set to  0.000000
8/26/2012	1:55:43 PM	PH3 MFC set to  0.000000
8/26/2012	1:55:43 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:55:43 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:55:43 PM	Tube furnace set to 150
8/26/2012	1:56:13 PM	H2 valve closed
8/26/2012	1:56:13 PM	BCl3 valve closed
8/26/2012	1:56:13 PM	PH3 valve closed
8/26/2012	1:56:13 PM	SiCl4 pre valve closed
8/26/2012	1:56:13 PM	SiCl4 post valve closed
8/26/2012	1:56:13 PM	Bypass valve closed
8/26/2012	1:56:13 PM	Bubbler valve closed
8/26/2012	1:56:13 PM	Helium valve opened
8/26/2012	1:56:13 PM	Main Vac valve opened
8/26/2012	1:56:13 PM	Helium MFC set to  20.000000
8/26/2012	1:56:13 PM	H2 MFC set to  0.000000
8/26/2012	1:56:13 PM	BCl3 MFC set to  0.000000
8/26/2012	1:56:13 PM	PH3 MFC set to  0.000000
8/26/2012	1:56:13 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:56:13 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:56:13 PM	Tube furnace set to 150
8/26/2012	1:56:43 PM	Helium valve closed
8/26/2012	1:56:43 PM	H2 valve closed
8/26/2012	1:56:43 PM	BCl3 valve closed
8/26/2012	1:56:43 PM	PH3 valve closed
8/26/2012	1:56:43 PM	SiCl4 pre valve closed
8/26/2012	1:56:43 PM	SiCl4 post valve closed
8/26/2012	1:56:43 PM	Bypass valve closed
8/26/2012	1:56:43 PM	Bubbler valve closed
8/26/2012	1:56:43 PM	Main Vac valve opened
8/26/2012	1:56:43 PM	Helium MFC set to  0.000000
8/26/2012	1:56:43 PM	H2 MFC set to  0.000000
8/26/2012	1:56:43 PM	BCl3 MFC set to  0.000000
8/26/2012	1:56:43 PM	PH3 MFC set to  0.000000
8/26/2012	1:56:43 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:56:43 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:56:43 PM	Tube furnace set to 150
8/26/2012	1:57:13 PM	H2 valve closed
8/26/2012	1:57:13 PM	BCl3 valve closed
8/26/2012	1:57:13 PM	PH3 valve closed
8/26/2012	1:57:13 PM	SiCl4 pre valve closed
8/26/2012	1:57:13 PM	SiCl4 post valve closed
8/26/2012	1:57:13 PM	Bypass valve closed
8/26/2012	1:57:13 PM	Bubbler valve closed
8/26/2012	1:57:13 PM	Helium valve opened
8/26/2012	1:57:13 PM	Main Vac valve opened
8/26/2012	1:57:13 PM	Helium MFC set to  20.000000
8/26/2012	1:57:13 PM	H2 MFC set to  0.000000
8/26/2012	1:57:13 PM	BCl3 MFC set to  0.000000
8/26/2012	1:57:13 PM	PH3 MFC set to  0.000000
8/26/2012	1:57:13 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:57:13 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:57:14 PM	Tube furnace set to 150
8/26/2012	1:57:44 PM	Helium valve closed
8/26/2012	1:57:44 PM	H2 valve closed
8/26/2012	1:57:44 PM	BCl3 valve closed
8/26/2012	1:57:44 PM	PH3 valve closed
8/26/2012	1:57:44 PM	SiCl4 pre valve closed
8/26/2012	1:57:44 PM	SiCl4 post valve closed
8/26/2012	1:57:44 PM	Bypass valve closed
8/26/2012	1:57:44 PM	Bubbler valve closed
8/26/2012	1:57:44 PM	Main Vac valve opened
8/26/2012	1:57:44 PM	Helium MFC set to  0.000000
8/26/2012	1:57:44 PM	H2 MFC set to  0.000000
8/26/2012	1:57:44 PM	BCl3 MFC set to  0.000000
8/26/2012	1:57:44 PM	PH3 MFC set to  0.000000
8/26/2012	1:57:44 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:57:44 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:57:44 PM	Tube furnace set to 150
8/26/2012	1:58:14 PM	H2 valve closed
8/26/2012	1:58:14 PM	BCl3 valve closed
8/26/2012	1:58:14 PM	PH3 valve closed
8/26/2012	1:58:14 PM	SiCl4 pre valve closed
8/26/2012	1:58:14 PM	SiCl4 post valve closed
8/26/2012	1:58:14 PM	Bypass valve closed
8/26/2012	1:58:14 PM	Bubbler valve closed
8/26/2012	1:58:14 PM	Helium valve opened
8/26/2012	1:58:14 PM	Main Vac valve opened
8/26/2012	1:58:14 PM	Helium MFC set to  20.000000
8/26/2012	1:58:14 PM	H2 MFC set to  0.000000
8/26/2012	1:58:14 PM	BCl3 MFC set to  0.000000
8/26/2012	1:58:14 PM	PH3 MFC set to  0.000000
8/26/2012	1:58:14 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:58:14 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:58:14 PM	Tube furnace set to 150
8/26/2012	1:58:44 PM	Helium valve closed
8/26/2012	1:58:44 PM	H2 valve closed
8/26/2012	1:58:44 PM	BCl3 valve closed
8/26/2012	1:58:44 PM	PH3 valve closed
8/26/2012	1:58:44 PM	SiCl4 pre valve closed
8/26/2012	1:58:44 PM	SiCl4 post valve closed
8/26/2012	1:58:44 PM	Bypass valve closed
8/26/2012	1:58:44 PM	Bubbler valve closed
8/26/2012	1:58:44 PM	Main Vac valve opened
8/26/2012	1:58:44 PM	Helium MFC set to  0.000000
8/26/2012	1:58:44 PM	H2 MFC set to  0.000000
8/26/2012	1:58:44 PM	BCl3 MFC set to  0.000000
8/26/2012	1:58:44 PM	PH3 MFC set to  0.000000
8/26/2012	1:58:44 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:58:44 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:58:44 PM	Tube furnace set to 150
8/26/2012	1:59:14 PM	H2 valve closed
8/26/2012	1:59:14 PM	BCl3 valve closed
8/26/2012	1:59:14 PM	PH3 valve closed
8/26/2012	1:59:14 PM	SiCl4 pre valve closed
8/26/2012	1:59:14 PM	SiCl4 post valve closed
8/26/2012	1:59:14 PM	Bypass valve closed
8/26/2012	1:59:14 PM	Bubbler valve closed
8/26/2012	1:59:14 PM	Helium valve opened
8/26/2012	1:59:14 PM	Main Vac valve opened
8/26/2012	1:59:14 PM	Helium MFC set to  20.000000
8/26/2012	1:59:14 PM	H2 MFC set to  0.000000
8/26/2012	1:59:14 PM	BCl3 MFC set to  0.000000
8/26/2012	1:59:14 PM	PH3 MFC set to  0.000000
8/26/2012	1:59:14 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:59:14 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:59:15 PM	Tube furnace set to 150
8/26/2012	1:59:45 PM	Helium valve closed
8/26/2012	1:59:45 PM	H2 valve closed
8/26/2012	1:59:45 PM	BCl3 valve closed
8/26/2012	1:59:45 PM	PH3 valve closed
8/26/2012	1:59:45 PM	SiCl4 pre valve closed
8/26/2012	1:59:45 PM	SiCl4 post valve closed
8/26/2012	1:59:45 PM	Bypass valve closed
8/26/2012	1:59:45 PM	Bubbler valve closed
8/26/2012	1:59:45 PM	Main Vac valve opened
8/26/2012	1:59:45 PM	Helium MFC set to  0.000000
8/26/2012	1:59:45 PM	H2 MFC set to  0.000000
8/26/2012	1:59:45 PM	BCl3 MFC set to  0.000000
8/26/2012	1:59:45 PM	PH3 MFC set to  0.000000
8/26/2012	1:59:45 PM	SiCl4 MFC set to  0.000000
8/26/2012	1:59:45 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	1:59:45 PM	Tube furnace set to 150
8/26/2012	2:00:15 PM	H2 valve closed
8/26/2012	2:00:15 PM	BCl3 valve closed
8/26/2012	2:00:15 PM	PH3 valve closed
8/26/2012	2:00:15 PM	SiCl4 pre valve closed
8/26/2012	2:00:15 PM	SiCl4 post valve closed
8/26/2012	2:00:15 PM	Bypass valve closed
8/26/2012	2:00:15 PM	Bubbler valve closed
8/26/2012	2:00:15 PM	Helium valve opened
8/26/2012	2:00:15 PM	Main Vac valve opened
8/26/2012	2:00:15 PM	Helium MFC set to  20.000000
8/26/2012	2:00:15 PM	H2 MFC set to  0.000000
8/26/2012	2:00:15 PM	BCl3 MFC set to  0.000000
8/26/2012	2:00:15 PM	PH3 MFC set to  0.000000
8/26/2012	2:00:15 PM	SiCl4 MFC set to  0.000000
8/26/2012	2:00:15 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	2:00:15 PM	Tube furnace set to 150
8/26/2012	2:00:45 PM	Helium valve closed
8/26/2012	2:00:45 PM	H2 valve closed
8/26/2012	2:00:45 PM	BCl3 valve closed
8/26/2012	2:00:45 PM	PH3 valve closed
8/26/2012	2:00:45 PM	SiCl4 pre valve closed
8/26/2012	2:00:45 PM	SiCl4 post valve closed
8/26/2012	2:00:45 PM	Bypass valve closed
8/26/2012	2:00:45 PM	Bubbler valve closed
8/26/2012	2:00:45 PM	Main Vac valve opened
8/26/2012	2:00:45 PM	Helium MFC set to  0.000000
8/26/2012	2:00:45 PM	H2 MFC set to  0.000000
8/26/2012	2:00:45 PM	BCl3 MFC set to  0.000000
8/26/2012	2:00:45 PM	PH3 MFC set to  0.000000
8/26/2012	2:00:45 PM	SiCl4 MFC set to  0.000000
8/26/2012	2:00:45 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	2:00:45 PM	Tube furnace set to 150
8/26/2012	2:01:15 PM	H2 valve closed
8/26/2012	2:01:15 PM	BCl3 valve closed
8/26/2012	2:01:15 PM	PH3 valve closed
8/26/2012	2:01:15 PM	SiCl4 pre valve closed
8/26/2012	2:01:15 PM	SiCl4 post valve closed
8/26/2012	2:01:15 PM	Bypass valve closed
8/26/2012	2:01:15 PM	Bubbler valve closed
8/26/2012	2:01:15 PM	Helium valve opened
8/26/2012	2:01:15 PM	Main Vac valve opened
8/26/2012	2:01:15 PM	Helium MFC set to  20.000000
8/26/2012	2:01:15 PM	H2 MFC set to  0.000000
8/26/2012	2:01:15 PM	BCl3 MFC set to  0.000000
8/26/2012	2:01:15 PM	PH3 MFC set to  0.000000
8/26/2012	2:01:15 PM	SiCl4 MFC set to  0.000000
8/26/2012	2:01:15 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	2:01:16 PM	Tube furnace set to 150
8/26/2012	2:01:46 PM	Helium valve closed
8/26/2012	2:01:46 PM	H2 valve closed
8/26/2012	2:01:46 PM	BCl3 valve closed
8/26/2012	2:01:46 PM	PH3 valve closed
8/26/2012	2:01:46 PM	SiCl4 pre valve closed
8/26/2012	2:01:46 PM	SiCl4 post valve closed
8/26/2012	2:01:46 PM	Bypass valve closed
8/26/2012	2:01:46 PM	Bubbler valve closed
8/26/2012	2:01:46 PM	Main Vac valve opened
8/26/2012	2:01:46 PM	Helium MFC set to  0.000000
8/26/2012	2:01:46 PM	H2 MFC set to  0.000000
8/26/2012	2:01:46 PM	BCl3 MFC set to  0.000000
8/26/2012	2:01:46 PM	PH3 MFC set to  0.000000
8/26/2012	2:01:46 PM	SiCl4 MFC set to  0.000000
8/26/2012	2:01:46 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	2:01:46 PM	Tube furnace set to 150
8/26/2012	2:01:47 PM	Run finished at 2:01 PM
8/26/2012	2:02:59 PM	Main Vac valve closed
8/26/2012	2:03:19 PM	Main Vac valve opened
8/26/2012	2:05:38 PM	Recipe started at 2:05 PM
8/26/2012	2:05:38 PM	Helium valve closed
8/26/2012	2:05:38 PM	H2 valve closed
8/26/2012	2:05:38 PM	BCl3 valve closed
8/26/2012	2:05:38 PM	PH3 valve closed
8/26/2012	2:05:38 PM	SiCl4 pre valve closed
8/26/2012	2:05:38 PM	SiCl4 post valve closed
8/26/2012	2:05:38 PM	Main Vac valve closed
8/26/2012	2:05:38 PM	Bypass valve closed
8/26/2012	2:05:38 PM	Bubbler valve closed
8/26/2012	2:05:38 PM	Helium MFC set to  0.000000
8/26/2012	2:05:38 PM	H2 MFC set to  0.000000
8/26/2012	2:05:38 PM	BCl3 MFC set to  0.000000
8/26/2012	2:05:38 PM	PH3 MFC set to  0.000000
8/26/2012	2:05:38 PM	SiCl4 MFC set to  0.000000
8/26/2012	2:05:38 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	2:05:38 PM	Tube furnace set to 0
8/26/2012	2:05:41 PM	Helium valve closed
8/26/2012	2:05:41 PM	BCl3 valve closed
8/26/2012	2:05:41 PM	PH3 valve closed
8/26/2012	2:05:41 PM	SiCl4 pre valve closed
8/26/2012	2:05:41 PM	SiCl4 post valve closed
8/26/2012	2:05:41 PM	Main Vac valve closed
8/26/2012	2:05:41 PM	Bypass valve closed
8/26/2012	2:05:41 PM	Bubbler valve closed
8/26/2012	2:05:41 PM	H2 valve opened
8/26/2012	2:05:41 PM	Helium MFC set to  0.000000
8/26/2012	2:05:41 PM	H2 MFC set to  500.000000
8/26/2012	2:05:41 PM	BCl3 MFC set to  0.000000
8/26/2012	2:05:41 PM	PH3 MFC set to  0.000000
8/26/2012	2:05:41 PM	SiCl4 MFC set to  0.000000
8/26/2012	2:05:41 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	2:05:41 PM	Tube furnace set to 0
8/26/2012	2:06:53 PM	Helium valve closed
8/26/2012	2:06:53 PM	BCl3 valve closed
8/26/2012	2:06:53 PM	PH3 valve closed
8/26/2012	2:06:53 PM	SiCl4 pre valve closed
8/26/2012	2:06:53 PM	SiCl4 post valve closed
8/26/2012	2:06:53 PM	Main Vac valve closed
8/26/2012	2:06:53 PM	Bypass valve closed
8/26/2012	2:06:53 PM	H2 valve opened
8/26/2012	2:06:53 PM	Bubbler valve opened
8/26/2012	2:06:53 PM	Helium MFC set to  0.000000
8/26/2012	2:06:53 PM	H2 MFC set to  500.000000
8/26/2012	2:06:53 PM	BCl3 MFC set to  0.000000
8/26/2012	2:06:53 PM	PH3 MFC set to  0.000000
8/26/2012	2:06:53 PM	SiCl4 MFC set to  0.000000
8/26/2012	2:06:53 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	2:06:53 PM	Tube furnace set to 0
8/26/2012	2:06:54 PM	Helium valve closed
8/26/2012	2:06:54 PM	BCl3 valve closed
8/26/2012	2:06:54 PM	PH3 valve closed
8/26/2012	2:06:54 PM	SiCl4 pre valve closed
8/26/2012	2:06:54 PM	SiCl4 post valve closed
8/26/2012	2:06:54 PM	Main Vac valve closed
8/26/2012	2:06:54 PM	Bypass valve closed
8/26/2012	2:06:54 PM	H2 valve opened
8/26/2012	2:06:54 PM	Bubbler valve opened
8/26/2012	2:06:54 PM	Helium MFC set to  0.000000
8/26/2012	2:06:54 PM	H2 MFC set to  450.000000
8/26/2012	2:06:54 PM	BCl3 MFC set to  0.000000
8/26/2012	2:06:54 PM	PH3 MFC set to  0.000000
8/26/2012	2:06:54 PM	SiCl4 MFC set to  0.000000
8/26/2012	2:06:54 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	2:06:54 PM	Tube furnace set to 1000
8/26/2012	2:31:54 PM	Helium valve closed
8/26/2012	2:31:54 PM	PH3 valve closed
8/26/2012	2:31:54 PM	Main Vac valve closed
8/26/2012	2:31:54 PM	Bypass valve closed
8/26/2012	2:31:54 PM	H2 valve opened
8/26/2012	2:31:54 PM	BCl3 valve opened
8/26/2012	2:31:54 PM	SiCl4 pre valve opened
8/26/2012	2:31:54 PM	SiCl4 post valve opened
8/26/2012	2:31:54 PM	Bubbler valve opened
8/26/2012	2:31:54 PM	Helium MFC set to  0.000000
8/26/2012	2:31:54 PM	H2 MFC set to  450.000000
8/26/2012	2:31:54 PM	BCl3 MFC set to  1.500000
8/26/2012	2:31:54 PM	PH3 MFC set to  0.000000
8/26/2012	2:31:54 PM	SiCl4 MFC set to  50.000000
8/26/2012	2:31:54 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	2:31:54 PM	Tube furnace set to 1000
8/26/2012	2:36:54 PM	Helium valve closed
8/26/2012	2:36:54 PM	BCl3 valve closed
8/26/2012	2:36:54 PM	PH3 valve closed
8/26/2012	2:36:54 PM	SiCl4 pre valve closed
8/26/2012	2:36:54 PM	SiCl4 post valve closed
8/26/2012	2:36:54 PM	Main Vac valve closed
8/26/2012	2:36:54 PM	Bypass valve closed
8/26/2012	2:36:54 PM	H2 valve opened
8/26/2012	2:36:54 PM	Bubbler valve opened
8/26/2012	2:36:54 PM	Helium MFC set to  0.000000
8/26/2012	2:36:54 PM	H2 MFC set to  500.000000
8/26/2012	2:36:54 PM	BCl3 MFC set to  0.000000
8/26/2012	2:36:54 PM	PH3 MFC set to  0.000000
8/26/2012	2:36:54 PM	SiCl4 MFC set to  0.000000
8/26/2012	2:36:54 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	2:36:54 PM	Tube furnace set to 750
8/26/2012	2:41:54 PM	H2 valve closed
8/26/2012	2:41:54 PM	BCl3 valve closed
8/26/2012	2:41:54 PM	PH3 valve closed
8/26/2012	2:41:54 PM	SiCl4 pre valve closed
8/26/2012	2:41:54 PM	SiCl4 post valve closed
8/26/2012	2:41:54 PM	Main Vac valve closed
8/26/2012	2:41:54 PM	Bypass valve closed
8/26/2012	2:41:54 PM	Helium valve opened
8/26/2012	2:41:54 PM	Bubbler valve opened
8/26/2012	2:41:54 PM	Helium MFC set to  500.000000
8/26/2012	2:41:54 PM	H2 MFC set to  0.000000
8/26/2012	2:41:54 PM	BCl3 MFC set to  0.000000
8/26/2012	2:41:55 PM	PH3 MFC set to  0.000000
8/26/2012	2:41:55 PM	SiCl4 MFC set to  0.000000
8/26/2012	2:41:55 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	2:41:55 PM	Tube furnace set to 0
8/26/2012	2:59:41 PM	Helium valve closed
8/26/2012	2:59:41 PM	H2 valve closed
8/26/2012	2:59:41 PM	BCl3 valve closed
8/26/2012	2:59:41 PM	PH3 valve closed
8/26/2012	2:59:41 PM	SiCl4 pre valve closed
8/26/2012	2:59:41 PM	SiCl4 post valve closed
8/26/2012	2:59:41 PM	Main Vac valve closed
8/26/2012	2:59:41 PM	Bypass valve closed
8/26/2012	2:59:41 PM	Bubbler valve closed
8/26/2012	2:59:41 PM	Helium MFC set to  0.000000
8/26/2012	2:59:41 PM	H2 MFC set to  0.000000
8/26/2012	2:59:41 PM	BCl3 MFC set to  0.000000
8/26/2012	2:59:41 PM	PH3 MFC set to  0.000000
8/26/2012	2:59:41 PM	SiCl4 MFC set to  0.000000
8/26/2012	2:59:41 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	2:59:42 PM	Tube furnace set to 0
8/26/2012	2:59:43 PM	Run finished at 2:59 PM
8/26/2012	2:59:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/26/2012	2:59:48 PM	Recipe started at 2:59 PM
8/26/2012	2:59:48 PM	Helium valve closed
8/26/2012	2:59:48 PM	H2 valve closed
8/26/2012	2:59:48 PM	BCl3 valve closed
8/26/2012	2:59:48 PM	PH3 valve closed
8/26/2012	2:59:48 PM	SiCl4 pre valve closed
8/26/2012	2:59:48 PM	SiCl4 post valve closed
8/26/2012	2:59:48 PM	Main Vac valve closed
8/26/2012	2:59:48 PM	Bypass valve closed
8/26/2012	2:59:48 PM	Bubbler valve closed
8/26/2012	2:59:48 PM	Helium MFC set to  0.000000
8/26/2012	2:59:48 PM	H2 MFC set to  0.000000
8/26/2012	2:59:48 PM	BCl3 MFC set to  0.000000
8/26/2012	2:59:48 PM	PH3 MFC set to  0.000000
8/26/2012	2:59:48 PM	SiCl4 MFC set to  0.000000
8/26/2012	2:59:48 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	2:59:48 PM	Tube furnace set to 0
8/26/2012	2:59:51 PM	H2 valve closed
8/26/2012	2:59:51 PM	BCl3 valve closed
8/26/2012	2:59:51 PM	PH3 valve closed
8/26/2012	2:59:51 PM	SiCl4 pre valve closed
8/26/2012	2:59:51 PM	SiCl4 post valve closed
8/26/2012	2:59:51 PM	Main Vac valve closed
8/26/2012	2:59:51 PM	Bypass valve closed
8/26/2012	2:59:51 PM	Bubbler valve closed
8/26/2012	2:59:51 PM	Helium valve opened
8/26/2012	2:59:51 PM	Helium MFC set to  500.000000
8/26/2012	2:59:51 PM	H2 MFC set to  0.000000
8/26/2012	2:59:51 PM	BCl3 MFC set to  0.000000
8/26/2012	2:59:51 PM	PH3 MFC set to  0.000000
8/26/2012	2:59:51 PM	SiCl4 MFC set to  0.000000
8/26/2012	2:59:51 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	2:59:51 PM	Tube furnace set to 0
8/26/2012	2:59:52 PM	Helium valve closed
8/26/2012	2:59:52 PM	H2 valve closed
8/26/2012	2:59:52 PM	BCl3 valve closed
8/26/2012	2:59:52 PM	PH3 valve closed
8/26/2012	2:59:52 PM	SiCl4 pre valve closed
8/26/2012	2:59:52 PM	SiCl4 post valve closed
8/26/2012	2:59:52 PM	Main Vac valve closed
8/26/2012	2:59:52 PM	Bypass valve closed
8/26/2012	2:59:52 PM	Bubbler valve closed
8/26/2012	2:59:52 PM	Helium MFC set to  0.000000
8/26/2012	2:59:52 PM	H2 MFC set to  0.000000
8/26/2012	2:59:52 PM	BCl3 MFC set to  0.000000
8/26/2012	2:59:52 PM	PH3 MFC set to  0.000000
8/26/2012	2:59:52 PM	SiCl4 MFC set to  0.000000
8/26/2012	2:59:52 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	2:59:52 PM	Tube furnace set to 0
8/26/2012	2:59:53 PM	Run finished at 2:59 PM
8/26/2012	2:59:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/26/2012	3:04:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2012	3:04:21 PM	Recipe started at 3:04 PM
8/26/2012	3:04:21 PM	Helium valve closed
8/26/2012	3:04:21 PM	H2 valve closed
8/26/2012	3:04:21 PM	BCl3 valve closed
8/26/2012	3:04:21 PM	PH3 valve closed
8/26/2012	3:04:21 PM	SiCl4 pre valve closed
8/26/2012	3:04:21 PM	SiCl4 post valve closed
8/26/2012	3:04:21 PM	Main Vac valve closed
8/26/2012	3:04:21 PM	Bubbler valve closed
8/26/2012	3:04:21 PM	Bypass valve opened
8/26/2012	3:04:21 PM	Helium MFC set to  0.000000
8/26/2012	3:04:21 PM	H2 MFC set to  0.000000
8/26/2012	3:04:21 PM	BCl3 MFC set to  0.000000
8/26/2012	3:04:21 PM	PH3 MFC set to  0.000000
8/26/2012	3:04:21 PM	SiCl4 MFC set to  0.000000
8/26/2012	3:04:21 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	3:04:21 PM	Tube furnace set to 0
8/26/2012	3:05:31 PM	Helium valve closed
8/26/2012	3:05:31 PM	H2 valve closed
8/26/2012	3:05:31 PM	BCl3 valve closed
8/26/2012	3:05:31 PM	PH3 valve closed
8/26/2012	3:05:31 PM	SiCl4 pre valve closed
8/26/2012	3:05:31 PM	SiCl4 post valve closed
8/26/2012	3:05:31 PM	Main Vac valve closed
8/26/2012	3:05:31 PM	Bubbler valve closed
8/26/2012	3:05:31 PM	Bypass valve opened
8/26/2012	3:05:31 PM	Helium MFC set to  0.000000
8/26/2012	3:05:31 PM	H2 MFC set to  0.000000
8/26/2012	3:05:31 PM	BCl3 MFC set to  0.000000
8/26/2012	3:05:31 PM	PH3 MFC set to  0.000000
8/26/2012	3:05:31 PM	SiCl4 MFC set to  0.000000
8/26/2012	3:05:31 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	3:05:31 PM	Tube furnace set to 0
8/26/2012	3:06:31 PM	Helium valve closed
8/26/2012	3:06:31 PM	H2 valve closed
8/26/2012	3:06:31 PM	BCl3 valve closed
8/26/2012	3:06:31 PM	PH3 valve closed
8/26/2012	3:06:31 PM	SiCl4 pre valve closed
8/26/2012	3:06:31 PM	SiCl4 post valve closed
8/26/2012	3:06:31 PM	Bypass valve closed
8/26/2012	3:06:31 PM	Bubbler valve closed
8/26/2012	3:06:31 PM	Main Vac valve opened
8/26/2012	3:06:31 PM	Helium MFC set to  0.000000
8/26/2012	3:06:31 PM	H2 MFC set to  0.000000
8/26/2012	3:06:31 PM	BCl3 MFC set to  0.000000
8/26/2012	3:06:31 PM	PH3 MFC set to  0.000000
8/26/2012	3:06:31 PM	SiCl4 MFC set to  0.000000
8/26/2012	3:06:31 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	3:06:31 PM	Tube furnace set to 0
8/26/2012	3:06:32 PM	Run finished at 3:06 PM
8/26/2012	3:06:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2012	3:07:00 PM	Recipe started at 3:06 PM
8/26/2012	3:07:00 PM	Helium valve closed
8/26/2012	3:07:00 PM	H2 valve closed
8/26/2012	3:07:00 PM	BCl3 valve closed
8/26/2012	3:07:00 PM	PH3 valve closed
8/26/2012	3:07:00 PM	SiCl4 pre valve closed
8/26/2012	3:07:00 PM	SiCl4 post valve closed
8/26/2012	3:07:00 PM	Bypass valve closed
8/26/2012	3:07:00 PM	Bubbler valve closed
8/26/2012	3:07:00 PM	Main Vac valve opened
8/26/2012	3:07:00 PM	Helium MFC set to  0.000000
8/26/2012	3:07:00 PM	H2 MFC set to  0.000000
8/26/2012	3:07:00 PM	BCl3 MFC set to  0.000000
8/26/2012	3:07:00 PM	PH3 MFC set to  0.000000
8/26/2012	3:07:00 PM	SiCl4 MFC set to  0.000000
8/26/2012	3:07:00 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	3:07:01 PM	Tube furnace set to 150
8/26/2012	5:07:00 PM	H2 valve closed
8/26/2012	5:07:00 PM	BCl3 valve closed
8/26/2012	5:07:00 PM	PH3 valve closed
8/26/2012	5:07:00 PM	SiCl4 pre valve closed
8/26/2012	5:07:00 PM	SiCl4 post valve closed
8/26/2012	5:07:00 PM	Bypass valve closed
8/26/2012	5:07:01 PM	Bubbler valve closed
8/26/2012	5:07:01 PM	Helium valve opened
8/26/2012	5:07:01 PM	Main Vac valve opened
8/26/2012	5:07:01 PM	Helium MFC set to  20.000000
8/26/2012	5:07:01 PM	H2 MFC set to  0.000000
8/26/2012	5:07:01 PM	BCl3 MFC set to  0.000000
8/26/2012	5:07:01 PM	PH3 MFC set to  0.000000
8/26/2012	5:07:01 PM	SiCl4 MFC set to  0.000000
8/26/2012	5:07:01 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	5:07:01 PM	Tube furnace set to 150
8/26/2012	5:07:31 PM	Helium valve closed
8/26/2012	5:07:31 PM	H2 valve closed
8/26/2012	5:07:31 PM	BCl3 valve closed
8/26/2012	5:07:31 PM	PH3 valve closed
8/26/2012	5:07:31 PM	SiCl4 pre valve closed
8/26/2012	5:07:31 PM	SiCl4 post valve closed
8/26/2012	5:07:31 PM	Bypass valve closed
8/26/2012	5:07:31 PM	Bubbler valve closed
8/26/2012	5:07:31 PM	Main Vac valve opened
8/26/2012	5:07:31 PM	Helium MFC set to  0.000000
8/26/2012	5:07:31 PM	H2 MFC set to  0.000000
8/26/2012	5:07:31 PM	BCl3 MFC set to  0.000000
8/26/2012	5:07:31 PM	PH3 MFC set to  0.000000
8/26/2012	5:07:31 PM	SiCl4 MFC set to  0.000000
8/26/2012	5:07:31 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	5:07:31 PM	Tube furnace set to 150
8/26/2012	5:08:01 PM	H2 valve closed
8/26/2012	5:08:01 PM	BCl3 valve closed
8/26/2012	5:08:01 PM	PH3 valve closed
8/26/2012	5:08:01 PM	SiCl4 pre valve closed
8/26/2012	5:08:01 PM	SiCl4 post valve closed
8/26/2012	5:08:01 PM	Bypass valve closed
8/26/2012	5:08:01 PM	Bubbler valve closed
8/26/2012	5:08:01 PM	Helium valve opened
8/26/2012	5:08:01 PM	Main Vac valve opened
8/26/2012	5:08:01 PM	Helium MFC set to  20.000000
8/26/2012	5:08:01 PM	H2 MFC set to  0.000000
8/26/2012	5:08:01 PM	BCl3 MFC set to  0.000000
8/26/2012	5:08:01 PM	PH3 MFC set to  0.000000
8/26/2012	5:08:01 PM	SiCl4 MFC set to  0.000000
8/26/2012	5:08:01 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	5:08:01 PM	Tube furnace set to 150
8/26/2012	5:08:31 PM	Helium valve closed
8/26/2012	5:08:31 PM	H2 valve closed
8/26/2012	5:08:31 PM	BCl3 valve closed
8/26/2012	5:08:31 PM	PH3 valve closed
8/26/2012	5:08:31 PM	SiCl4 pre valve closed
8/26/2012	5:08:31 PM	SiCl4 post valve closed
8/26/2012	5:08:31 PM	Bypass valve closed
8/26/2012	5:08:31 PM	Bubbler valve closed
8/26/2012	5:08:31 PM	Main Vac valve opened
8/26/2012	5:08:31 PM	Helium MFC set to  0.000000
8/26/2012	5:08:31 PM	H2 MFC set to  0.000000
8/26/2012	5:08:31 PM	BCl3 MFC set to  0.000000
8/26/2012	5:08:31 PM	PH3 MFC set to  0.000000
8/26/2012	5:08:31 PM	SiCl4 MFC set to  0.000000
8/26/2012	5:08:31 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	5:08:31 PM	Tube furnace set to 150
8/26/2012	5:09:01 PM	H2 valve closed
8/26/2012	5:09:01 PM	BCl3 valve closed
8/26/2012	5:09:01 PM	PH3 valve closed
8/26/2012	5:09:01 PM	SiCl4 pre valve closed
8/26/2012	5:09:01 PM	SiCl4 post valve closed
8/26/2012	5:09:01 PM	Bypass valve closed
8/26/2012	5:09:01 PM	Bubbler valve closed
8/26/2012	5:09:01 PM	Helium valve opened
8/26/2012	5:09:01 PM	Main Vac valve opened
8/26/2012	5:09:01 PM	Helium MFC set to  20.000000
8/26/2012	5:09:01 PM	H2 MFC set to  0.000000
8/26/2012	5:09:01 PM	BCl3 MFC set to  0.000000
8/26/2012	5:09:01 PM	PH3 MFC set to  0.000000
8/26/2012	5:09:01 PM	SiCl4 MFC set to  0.000000
8/26/2012	5:09:01 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	5:09:02 PM	Tube furnace set to 150
8/26/2012	5:09:32 PM	Helium valve closed
8/26/2012	5:09:32 PM	H2 valve closed
8/26/2012	5:09:32 PM	BCl3 valve closed
8/26/2012	5:09:32 PM	PH3 valve closed
8/26/2012	5:09:32 PM	SiCl4 pre valve closed
8/26/2012	5:09:32 PM	SiCl4 post valve closed
8/26/2012	5:09:32 PM	Bypass valve closed
8/26/2012	5:09:32 PM	Bubbler valve closed
8/26/2012	5:09:32 PM	Main Vac valve opened
8/26/2012	5:09:32 PM	Helium MFC set to  0.000000
8/26/2012	5:09:32 PM	H2 MFC set to  0.000000
8/26/2012	5:09:32 PM	BCl3 MFC set to  0.000000
8/26/2012	5:09:32 PM	PH3 MFC set to  0.000000
8/26/2012	5:09:32 PM	SiCl4 MFC set to  0.000000
8/26/2012	5:09:32 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	5:09:32 PM	Tube furnace set to 150
8/26/2012	5:10:02 PM	H2 valve closed
8/26/2012	5:10:02 PM	BCl3 valve closed
8/26/2012	5:10:02 PM	PH3 valve closed
8/26/2012	5:10:02 PM	SiCl4 pre valve closed
8/26/2012	5:10:02 PM	SiCl4 post valve closed
8/26/2012	5:10:02 PM	Bypass valve closed
8/26/2012	5:10:02 PM	Bubbler valve closed
8/26/2012	5:10:02 PM	Helium valve opened
8/26/2012	5:10:02 PM	Main Vac valve opened
8/26/2012	5:10:02 PM	Helium MFC set to  20.000000
8/26/2012	5:10:02 PM	H2 MFC set to  0.000000
8/26/2012	5:10:02 PM	BCl3 MFC set to  0.000000
8/26/2012	5:10:02 PM	PH3 MFC set to  0.000000
8/26/2012	5:10:02 PM	SiCl4 MFC set to  0.000000
8/26/2012	5:10:02 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	5:10:02 PM	Tube furnace set to 150
8/26/2012	5:10:32 PM	Helium valve closed
8/26/2012	5:10:32 PM	H2 valve closed
8/26/2012	5:10:32 PM	BCl3 valve closed
8/26/2012	5:10:32 PM	PH3 valve closed
8/26/2012	5:10:32 PM	SiCl4 pre valve closed
8/26/2012	5:10:32 PM	SiCl4 post valve closed
8/26/2012	5:10:32 PM	Bypass valve closed
8/26/2012	5:10:32 PM	Bubbler valve closed
8/26/2012	5:10:32 PM	Main Vac valve opened
8/26/2012	5:10:32 PM	Helium MFC set to  0.000000
8/26/2012	5:10:32 PM	H2 MFC set to  0.000000
8/26/2012	5:10:32 PM	BCl3 MFC set to  0.000000
8/26/2012	5:10:32 PM	PH3 MFC set to  0.000000
8/26/2012	5:10:32 PM	SiCl4 MFC set to  0.000000
8/26/2012	5:10:32 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	5:10:32 PM	Tube furnace set to 150
8/26/2012	5:11:02 PM	H2 valve closed
8/26/2012	5:11:02 PM	BCl3 valve closed
8/26/2012	5:11:02 PM	PH3 valve closed
8/26/2012	5:11:02 PM	SiCl4 pre valve closed
8/26/2012	5:11:02 PM	SiCl4 post valve closed
8/26/2012	5:11:02 PM	Bypass valve closed
8/26/2012	5:11:02 PM	Bubbler valve closed
8/26/2012	5:11:02 PM	Helium valve opened
8/26/2012	5:11:02 PM	Main Vac valve opened
8/26/2012	5:11:02 PM	Helium MFC set to  20.000000
8/26/2012	5:11:02 PM	H2 MFC set to  0.000000
8/26/2012	5:11:02 PM	BCl3 MFC set to  0.000000
8/26/2012	5:11:02 PM	PH3 MFC set to  0.000000
8/26/2012	5:11:02 PM	SiCl4 MFC set to  0.000000
8/26/2012	5:11:02 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	5:11:03 PM	Tube furnace set to 150
8/26/2012	5:11:33 PM	Helium valve closed
8/26/2012	5:11:33 PM	H2 valve closed
8/26/2012	5:11:33 PM	BCl3 valve closed
8/26/2012	5:11:33 PM	PH3 valve closed
8/26/2012	5:11:33 PM	SiCl4 pre valve closed
8/26/2012	5:11:33 PM	SiCl4 post valve closed
8/26/2012	5:11:33 PM	Bypass valve closed
8/26/2012	5:11:33 PM	Bubbler valve closed
8/26/2012	5:11:33 PM	Main Vac valve opened
8/26/2012	5:11:33 PM	Helium MFC set to  0.000000
8/26/2012	5:11:33 PM	H2 MFC set to  0.000000
8/26/2012	5:11:33 PM	BCl3 MFC set to  0.000000
8/26/2012	5:11:33 PM	PH3 MFC set to  0.000000
8/26/2012	5:11:33 PM	SiCl4 MFC set to  0.000000
8/26/2012	5:11:33 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	5:11:33 PM	Tube furnace set to 150
8/26/2012	5:12:03 PM	H2 valve closed
8/26/2012	5:12:03 PM	BCl3 valve closed
8/26/2012	5:12:03 PM	PH3 valve closed
8/26/2012	5:12:03 PM	SiCl4 pre valve closed
8/26/2012	5:12:03 PM	SiCl4 post valve closed
8/26/2012	5:12:03 PM	Bypass valve closed
8/26/2012	5:12:03 PM	Bubbler valve closed
8/26/2012	5:12:03 PM	Helium valve opened
8/26/2012	5:12:03 PM	Main Vac valve opened
8/26/2012	5:12:03 PM	Helium MFC set to  20.000000
8/26/2012	5:12:03 PM	H2 MFC set to  0.000000
8/26/2012	5:12:03 PM	BCl3 MFC set to  0.000000
8/26/2012	5:12:03 PM	PH3 MFC set to  0.000000
8/26/2012	5:12:03 PM	SiCl4 MFC set to  0.000000
8/26/2012	5:12:03 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	5:12:03 PM	Tube furnace set to 150
8/26/2012	5:12:33 PM	Helium valve closed
8/26/2012	5:12:33 PM	H2 valve closed
8/26/2012	5:12:33 PM	BCl3 valve closed
8/26/2012	5:12:33 PM	PH3 valve closed
8/26/2012	5:12:33 PM	SiCl4 pre valve closed
8/26/2012	5:12:33 PM	SiCl4 post valve closed
8/26/2012	5:12:33 PM	Bypass valve closed
8/26/2012	5:12:33 PM	Bubbler valve closed
8/26/2012	5:12:33 PM	Main Vac valve opened
8/26/2012	5:12:33 PM	Helium MFC set to  0.000000
8/26/2012	5:12:33 PM	H2 MFC set to  0.000000
8/26/2012	5:12:33 PM	BCl3 MFC set to  0.000000
8/26/2012	5:12:33 PM	PH3 MFC set to  0.000000
8/26/2012	5:12:33 PM	SiCl4 MFC set to  0.000000
8/26/2012	5:12:33 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	5:12:33 PM	Tube furnace set to 150
8/26/2012	5:13:03 PM	H2 valve closed
8/26/2012	5:13:03 PM	BCl3 valve closed
8/26/2012	5:13:03 PM	PH3 valve closed
8/26/2012	5:13:03 PM	SiCl4 pre valve closed
8/26/2012	5:13:03 PM	SiCl4 post valve closed
8/26/2012	5:13:03 PM	Bypass valve closed
8/26/2012	5:13:03 PM	Bubbler valve closed
8/26/2012	5:13:03 PM	Helium valve opened
8/26/2012	5:13:03 PM	Main Vac valve opened
8/26/2012	5:13:03 PM	Helium MFC set to  20.000000
8/26/2012	5:13:03 PM	H2 MFC set to  0.000000
8/26/2012	5:13:03 PM	BCl3 MFC set to  0.000000
8/26/2012	5:13:03 PM	PH3 MFC set to  0.000000
8/26/2012	5:13:03 PM	SiCl4 MFC set to  0.000000
8/26/2012	5:13:03 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	5:13:04 PM	Tube furnace set to 150
8/26/2012	5:13:34 PM	Helium valve closed
8/26/2012	5:13:34 PM	H2 valve closed
8/26/2012	5:13:34 PM	BCl3 valve closed
8/26/2012	5:13:34 PM	PH3 valve closed
8/26/2012	5:13:34 PM	SiCl4 pre valve closed
8/26/2012	5:13:34 PM	SiCl4 post valve closed
8/26/2012	5:13:34 PM	Bypass valve closed
8/26/2012	5:13:34 PM	Bubbler valve closed
8/26/2012	5:13:34 PM	Main Vac valve opened
8/26/2012	5:13:34 PM	Helium MFC set to  0.000000
8/26/2012	5:13:34 PM	H2 MFC set to  0.000000
8/26/2012	5:13:34 PM	BCl3 MFC set to  0.000000
8/26/2012	5:13:34 PM	PH3 MFC set to  0.000000
8/26/2012	5:13:34 PM	SiCl4 MFC set to  0.000000
8/26/2012	5:13:34 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	5:13:34 PM	Tube furnace set to 150
8/26/2012	5:14:04 PM	H2 valve closed
8/26/2012	5:14:04 PM	BCl3 valve closed
8/26/2012	5:14:04 PM	PH3 valve closed
8/26/2012	5:14:04 PM	SiCl4 pre valve closed
8/26/2012	5:14:04 PM	SiCl4 post valve closed
8/26/2012	5:14:04 PM	Bypass valve closed
8/26/2012	5:14:04 PM	Bubbler valve closed
8/26/2012	5:14:04 PM	Helium valve opened
8/26/2012	5:14:04 PM	Main Vac valve opened
8/26/2012	5:14:04 PM	Helium MFC set to  20.000000
8/26/2012	5:14:04 PM	H2 MFC set to  0.000000
8/26/2012	5:14:04 PM	BCl3 MFC set to  0.000000
8/26/2012	5:14:04 PM	PH3 MFC set to  0.000000
8/26/2012	5:14:04 PM	SiCl4 MFC set to  0.000000
8/26/2012	5:14:04 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	5:14:04 PM	Tube furnace set to 150
8/26/2012	5:14:34 PM	Helium valve closed
8/26/2012	5:14:34 PM	H2 valve closed
8/26/2012	5:14:34 PM	BCl3 valve closed
8/26/2012	5:14:34 PM	PH3 valve closed
8/26/2012	5:14:34 PM	SiCl4 pre valve closed
8/26/2012	5:14:34 PM	SiCl4 post valve closed
8/26/2012	5:14:34 PM	Bypass valve closed
8/26/2012	5:14:34 PM	Bubbler valve closed
8/26/2012	5:14:34 PM	Main Vac valve opened
8/26/2012	5:14:34 PM	Helium MFC set to  0.000000
8/26/2012	5:14:34 PM	H2 MFC set to  0.000000
8/26/2012	5:14:34 PM	BCl3 MFC set to  0.000000
8/26/2012	5:14:34 PM	PH3 MFC set to  0.000000
8/26/2012	5:14:34 PM	SiCl4 MFC set to  0.000000
8/26/2012	5:14:34 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	5:14:34 PM	Tube furnace set to 150
8/26/2012	5:15:04 PM	H2 valve closed
8/26/2012	5:15:04 PM	BCl3 valve closed
8/26/2012	5:15:04 PM	PH3 valve closed
8/26/2012	5:15:04 PM	SiCl4 pre valve closed
8/26/2012	5:15:04 PM	SiCl4 post valve closed
8/26/2012	5:15:04 PM	Bypass valve closed
8/26/2012	5:15:04 PM	Bubbler valve closed
8/26/2012	5:15:04 PM	Helium valve opened
8/26/2012	5:15:04 PM	Main Vac valve opened
8/26/2012	5:15:04 PM	Helium MFC set to  20.000000
8/26/2012	5:15:04 PM	H2 MFC set to  0.000000
8/26/2012	5:15:04 PM	BCl3 MFC set to  0.000000
8/26/2012	5:15:04 PM	PH3 MFC set to  0.000000
8/26/2012	5:15:04 PM	SiCl4 MFC set to  0.000000
8/26/2012	5:15:04 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	5:15:04 PM	Tube furnace set to 150
8/26/2012	5:15:35 PM	Helium valve closed
8/26/2012	5:15:35 PM	H2 valve closed
8/26/2012	5:15:35 PM	BCl3 valve closed
8/26/2012	5:15:35 PM	PH3 valve closed
8/26/2012	5:15:35 PM	SiCl4 pre valve closed
8/26/2012	5:15:35 PM	SiCl4 post valve closed
8/26/2012	5:15:35 PM	Bypass valve closed
8/26/2012	5:15:35 PM	Bubbler valve closed
8/26/2012	5:15:35 PM	Main Vac valve opened
8/26/2012	5:15:35 PM	Helium MFC set to  0.000000
8/26/2012	5:15:35 PM	H2 MFC set to  0.000000
8/26/2012	5:15:35 PM	BCl3 MFC set to  0.000000
8/26/2012	5:15:35 PM	PH3 MFC set to  0.000000
8/26/2012	5:15:35 PM	SiCl4 MFC set to  0.000000
8/26/2012	5:15:35 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	5:15:35 PM	Tube furnace set to 150
8/26/2012	5:16:05 PM	H2 valve closed
8/26/2012	5:16:05 PM	BCl3 valve closed
8/26/2012	5:16:05 PM	PH3 valve closed
8/26/2012	5:16:05 PM	SiCl4 pre valve closed
8/26/2012	5:16:05 PM	SiCl4 post valve closed
8/26/2012	5:16:05 PM	Bypass valve closed
8/26/2012	5:16:05 PM	Bubbler valve closed
8/26/2012	5:16:05 PM	Helium valve opened
8/26/2012	5:16:05 PM	Main Vac valve opened
8/26/2012	5:16:05 PM	Helium MFC set to  20.000000
8/26/2012	5:16:05 PM	H2 MFC set to  0.000000
8/26/2012	5:16:05 PM	BCl3 MFC set to  0.000000
8/26/2012	5:16:05 PM	PH3 MFC set to  0.000000
8/26/2012	5:16:05 PM	SiCl4 MFC set to  0.000000
8/26/2012	5:16:05 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	5:16:05 PM	Tube furnace set to 150
8/26/2012	5:16:35 PM	Helium valve closed
8/26/2012	5:16:35 PM	H2 valve closed
8/26/2012	5:16:35 PM	BCl3 valve closed
8/26/2012	5:16:35 PM	PH3 valve closed
8/26/2012	5:16:35 PM	SiCl4 pre valve closed
8/26/2012	5:16:35 PM	SiCl4 post valve closed
8/26/2012	5:16:35 PM	Bypass valve closed
8/26/2012	5:16:35 PM	Bubbler valve closed
8/26/2012	5:16:35 PM	Main Vac valve opened
8/26/2012	5:16:35 PM	Helium MFC set to  0.000000
8/26/2012	5:16:35 PM	H2 MFC set to  0.000000
8/26/2012	5:16:35 PM	BCl3 MFC set to  0.000000
8/26/2012	5:16:35 PM	PH3 MFC set to  0.000000
8/26/2012	5:16:35 PM	SiCl4 MFC set to  0.000000
8/26/2012	5:16:35 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	5:16:35 PM	Tube furnace set to 150
8/26/2012	5:16:36 PM	Run finished at 5:16 PM
8/26/2012	7:19:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/26/2012	7:20:03 PM	Recipe started at 7:19 PM
8/26/2012	7:20:03 PM	Helium valve closed
8/26/2012	7:20:03 PM	H2 valve closed
8/26/2012	7:20:03 PM	BCl3 valve closed
8/26/2012	7:20:03 PM	PH3 valve closed
8/26/2012	7:20:03 PM	SiCl4 pre valve closed
8/26/2012	7:20:03 PM	SiCl4 post valve closed
8/26/2012	7:20:03 PM	Main Vac valve closed
8/26/2012	7:20:03 PM	Bubbler valve closed
8/26/2012	7:20:03 PM	Bypass valve opened
8/26/2012	7:20:03 PM	Helium MFC set to  0.000000
8/26/2012	7:20:03 PM	H2 MFC set to  0.000000
8/26/2012	7:20:03 PM	BCl3 MFC set to  0.000000
8/26/2012	7:20:03 PM	PH3 MFC set to  0.000000
8/26/2012	7:20:03 PM	SiCl4 MFC set to  0.000000
8/26/2012	7:20:03 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	7:20:04 PM	Tube furnace set to 0
8/26/2012	7:20:04 PM	Helium valve closed
8/26/2012	7:20:04 PM	H2 valve closed
8/26/2012	7:20:04 PM	BCl3 valve closed
8/26/2012	7:20:04 PM	PH3 valve closed
8/26/2012	7:20:04 PM	SiCl4 pre valve closed
8/26/2012	7:20:04 PM	SiCl4 post valve closed
8/26/2012	7:20:04 PM	Main Vac valve closed
8/26/2012	7:20:04 PM	Bubbler valve closed
8/26/2012	7:20:04 PM	Bypass valve opened
8/26/2012	7:20:04 PM	Helium MFC set to  0.000000
8/26/2012	7:20:04 PM	H2 MFC set to  0.000000
8/26/2012	7:20:04 PM	BCl3 MFC set to  0.000000
8/26/2012	7:20:04 PM	PH3 MFC set to  0.000000
8/26/2012	7:20:04 PM	SiCl4 MFC set to  0.000000
8/26/2012	7:20:04 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	7:20:04 PM	Tube furnace set to 0
8/26/2012	7:20:17 PM	Helium valve closed
8/26/2012	7:20:17 PM	H2 valve closed
8/26/2012	7:20:17 PM	BCl3 valve closed
8/26/2012	7:20:17 PM	PH3 valve closed
8/26/2012	7:20:17 PM	SiCl4 pre valve closed
8/26/2012	7:20:17 PM	SiCl4 post valve closed
8/26/2012	7:20:17 PM	Bypass valve closed
8/26/2012	7:20:17 PM	Bubbler valve closed
8/26/2012	7:20:17 PM	Main Vac valve opened
8/26/2012	7:20:17 PM	Helium MFC set to  0.000000
8/26/2012	7:20:17 PM	H2 MFC set to  0.000000
8/26/2012	7:20:17 PM	BCl3 MFC set to  0.000000
8/26/2012	7:20:17 PM	PH3 MFC set to  0.000000
8/26/2012	7:20:17 PM	SiCl4 MFC set to  0.000000
8/26/2012	7:20:17 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	7:20:17 PM	Tube furnace set to 0
8/26/2012	7:20:31 PM	H2 valve closed
8/26/2012	7:20:31 PM	BCl3 valve closed
8/26/2012	7:20:31 PM	PH3 valve closed
8/26/2012	7:20:31 PM	SiCl4 pre valve closed
8/26/2012	7:20:31 PM	SiCl4 post valve closed
8/26/2012	7:20:31 PM	Bypass valve closed
8/26/2012	7:20:31 PM	Bubbler valve closed
8/26/2012	7:20:31 PM	Helium valve opened
8/26/2012	7:20:31 PM	Main Vac valve opened
8/26/2012	7:20:31 PM	Helium MFC set to  20.000000
8/26/2012	7:20:31 PM	H2 MFC set to  0.000000
8/26/2012	7:20:31 PM	BCl3 MFC set to  0.000000
8/26/2012	7:20:31 PM	PH3 MFC set to  0.000000
8/26/2012	7:20:31 PM	SiCl4 MFC set to  0.000000
8/26/2012	7:20:31 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	7:20:31 PM	Tube furnace set to 0
8/26/2012	7:21:01 PM	Helium valve closed
8/26/2012	7:21:01 PM	H2 valve closed
8/26/2012	7:21:01 PM	BCl3 valve closed
8/26/2012	7:21:01 PM	PH3 valve closed
8/26/2012	7:21:01 PM	SiCl4 pre valve closed
8/26/2012	7:21:01 PM	SiCl4 post valve closed
8/26/2012	7:21:01 PM	Bypass valve closed
8/26/2012	7:21:01 PM	Bubbler valve closed
8/26/2012	7:21:01 PM	Main Vac valve opened
8/26/2012	7:21:01 PM	Helium MFC set to  0.000000
8/26/2012	7:21:01 PM	H2 MFC set to  0.000000
8/26/2012	7:21:01 PM	BCl3 MFC set to  0.000000
8/26/2012	7:21:01 PM	PH3 MFC set to  0.000000
8/26/2012	7:21:01 PM	SiCl4 MFC set to  0.000000
8/26/2012	7:21:01 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	7:21:01 PM	Tube furnace set to 0
8/26/2012	7:21:31 PM	H2 valve closed
8/26/2012	7:21:31 PM	BCl3 valve closed
8/26/2012	7:21:31 PM	PH3 valve closed
8/26/2012	7:21:31 PM	SiCl4 pre valve closed
8/26/2012	7:21:31 PM	SiCl4 post valve closed
8/26/2012	7:21:31 PM	Bypass valve closed
8/26/2012	7:21:31 PM	Bubbler valve closed
8/26/2012	7:21:31 PM	Helium valve opened
8/26/2012	7:21:31 PM	Main Vac valve opened
8/26/2012	7:21:31 PM	Helium MFC set to  20.000000
8/26/2012	7:21:31 PM	H2 MFC set to  0.000000
8/26/2012	7:21:31 PM	BCl3 MFC set to  0.000000
8/26/2012	7:21:31 PM	PH3 MFC set to  0.000000
8/26/2012	7:21:31 PM	SiCl4 MFC set to  0.000000
8/26/2012	7:21:31 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	7:21:32 PM	Tube furnace set to 0
8/26/2012	7:22:02 PM	Helium valve closed
8/26/2012	7:22:02 PM	H2 valve closed
8/26/2012	7:22:02 PM	BCl3 valve closed
8/26/2012	7:22:02 PM	PH3 valve closed
8/26/2012	7:22:02 PM	SiCl4 pre valve closed
8/26/2012	7:22:02 PM	SiCl4 post valve closed
8/26/2012	7:22:02 PM	Bypass valve closed
8/26/2012	7:22:02 PM	Bubbler valve closed
8/26/2012	7:22:02 PM	Main Vac valve opened
8/26/2012	7:22:02 PM	Helium MFC set to  0.000000
8/26/2012	7:22:02 PM	H2 MFC set to  0.000000
8/26/2012	7:22:02 PM	BCl3 MFC set to  0.000000
8/26/2012	7:22:02 PM	PH3 MFC set to  0.000000
8/26/2012	7:22:02 PM	SiCl4 MFC set to  0.000000
8/26/2012	7:22:02 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	7:22:02 PM	Tube furnace set to 0
8/26/2012	7:22:32 PM	H2 valve closed
8/26/2012	7:22:32 PM	BCl3 valve closed
8/26/2012	7:22:32 PM	PH3 valve closed
8/26/2012	7:22:32 PM	SiCl4 pre valve closed
8/26/2012	7:22:32 PM	SiCl4 post valve closed
8/26/2012	7:22:32 PM	Bypass valve closed
8/26/2012	7:22:32 PM	Bubbler valve closed
8/26/2012	7:22:32 PM	Helium valve opened
8/26/2012	7:22:32 PM	Main Vac valve opened
8/26/2012	7:22:32 PM	Helium MFC set to  20.000000
8/26/2012	7:22:32 PM	H2 MFC set to  0.000000
8/26/2012	7:22:32 PM	BCl3 MFC set to  0.000000
8/26/2012	7:22:32 PM	PH3 MFC set to  0.000000
8/26/2012	7:22:32 PM	SiCl4 MFC set to  0.000000
8/26/2012	7:22:32 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	7:22:32 PM	Tube furnace set to 0
8/26/2012	7:23:02 PM	Helium valve closed
8/26/2012	7:23:02 PM	H2 valve closed
8/26/2012	7:23:02 PM	BCl3 valve closed
8/26/2012	7:23:02 PM	PH3 valve closed
8/26/2012	7:23:02 PM	SiCl4 pre valve closed
8/26/2012	7:23:02 PM	SiCl4 post valve closed
8/26/2012	7:23:02 PM	Bypass valve closed
8/26/2012	7:23:02 PM	Bubbler valve closed
8/26/2012	7:23:02 PM	Main Vac valve opened
8/26/2012	7:23:02 PM	Helium MFC set to  0.000000
8/26/2012	7:23:02 PM	H2 MFC set to  0.000000
8/26/2012	7:23:02 PM	BCl3 MFC set to  0.000000
8/26/2012	7:23:02 PM	PH3 MFC set to  0.000000
8/26/2012	7:23:02 PM	SiCl4 MFC set to  0.000000
8/26/2012	7:23:02 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	7:23:02 PM	Tube furnace set to 0
8/26/2012	7:23:32 PM	H2 valve closed
8/26/2012	7:23:32 PM	BCl3 valve closed
8/26/2012	7:23:32 PM	PH3 valve closed
8/26/2012	7:23:32 PM	SiCl4 pre valve closed
8/26/2012	7:23:32 PM	SiCl4 post valve closed
8/26/2012	7:23:32 PM	Bypass valve closed
8/26/2012	7:23:32 PM	Bubbler valve closed
8/26/2012	7:23:32 PM	Helium valve opened
8/26/2012	7:23:32 PM	Main Vac valve opened
8/26/2012	7:23:32 PM	Helium MFC set to  20.000000
8/26/2012	7:23:32 PM	H2 MFC set to  0.000000
8/26/2012	7:23:32 PM	BCl3 MFC set to  0.000000
8/26/2012	7:23:32 PM	PH3 MFC set to  0.000000
8/26/2012	7:23:32 PM	SiCl4 MFC set to  0.000000
8/26/2012	7:23:32 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	7:23:32 PM	Tube furnace set to 0
8/26/2012	7:24:02 PM	Helium valve closed
8/26/2012	7:24:03 PM	H2 valve closed
8/26/2012	7:24:03 PM	BCl3 valve closed
8/26/2012	7:24:03 PM	PH3 valve closed
8/26/2012	7:24:03 PM	SiCl4 pre valve closed
8/26/2012	7:24:03 PM	SiCl4 post valve closed
8/26/2012	7:24:03 PM	Bypass valve closed
8/26/2012	7:24:03 PM	Bubbler valve closed
8/26/2012	7:24:03 PM	Main Vac valve opened
8/26/2012	7:24:03 PM	Helium MFC set to  0.000000
8/26/2012	7:24:03 PM	H2 MFC set to  0.000000
8/26/2012	7:24:03 PM	BCl3 MFC set to  0.000000
8/26/2012	7:24:03 PM	PH3 MFC set to  0.000000
8/26/2012	7:24:03 PM	SiCl4 MFC set to  0.000000
8/26/2012	7:24:03 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	7:24:03 PM	Tube furnace set to 0
8/26/2012	7:24:33 PM	H2 valve closed
8/26/2012	7:24:33 PM	BCl3 valve closed
8/26/2012	7:24:33 PM	PH3 valve closed
8/26/2012	7:24:33 PM	SiCl4 pre valve closed
8/26/2012	7:24:33 PM	SiCl4 post valve closed
8/26/2012	7:24:33 PM	Bypass valve closed
8/26/2012	7:24:33 PM	Bubbler valve closed
8/26/2012	7:24:33 PM	Helium valve opened
8/26/2012	7:24:33 PM	Main Vac valve opened
8/26/2012	7:24:33 PM	Helium MFC set to  20.000000
8/26/2012	7:24:33 PM	H2 MFC set to  0.000000
8/26/2012	7:24:33 PM	BCl3 MFC set to  0.000000
8/26/2012	7:24:33 PM	PH3 MFC set to  0.000000
8/26/2012	7:24:33 PM	SiCl4 MFC set to  0.000000
8/26/2012	7:24:33 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	7:24:33 PM	Tube furnace set to 0
8/26/2012	7:25:03 PM	Helium valve closed
8/26/2012	7:25:03 PM	H2 valve closed
8/26/2012	7:25:03 PM	BCl3 valve closed
8/26/2012	7:25:03 PM	PH3 valve closed
8/26/2012	7:25:03 PM	SiCl4 pre valve closed
8/26/2012	7:25:03 PM	SiCl4 post valve closed
8/26/2012	7:25:03 PM	Bypass valve closed
8/26/2012	7:25:03 PM	Bubbler valve closed
8/26/2012	7:25:03 PM	Main Vac valve opened
8/26/2012	7:25:03 PM	Helium MFC set to  0.000000
8/26/2012	7:25:03 PM	H2 MFC set to  0.000000
8/26/2012	7:25:03 PM	BCl3 MFC set to  0.000000
8/26/2012	7:25:03 PM	PH3 MFC set to  0.000000
8/26/2012	7:25:03 PM	SiCl4 MFC set to  0.000000
8/26/2012	7:25:03 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	7:25:03 PM	Tube furnace set to 0
8/26/2012	7:25:33 PM	H2 valve closed
8/26/2012	7:25:33 PM	BCl3 valve closed
8/26/2012	7:25:33 PM	PH3 valve closed
8/26/2012	7:25:33 PM	SiCl4 pre valve closed
8/26/2012	7:25:33 PM	SiCl4 post valve closed
8/26/2012	7:25:33 PM	Bypass valve closed
8/26/2012	7:25:33 PM	Bubbler valve closed
8/26/2012	7:25:33 PM	Helium valve opened
8/26/2012	7:25:33 PM	Main Vac valve opened
8/26/2012	7:25:33 PM	Helium MFC set to  20.000000
8/26/2012	7:25:33 PM	H2 MFC set to  0.000000
8/26/2012	7:25:33 PM	BCl3 MFC set to  0.000000
8/26/2012	7:25:33 PM	PH3 MFC set to  0.000000
8/26/2012	7:25:33 PM	SiCl4 MFC set to  0.000000
8/26/2012	7:25:33 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	7:25:33 PM	Tube furnace set to 0
8/26/2012	7:26:03 PM	Helium valve closed
8/26/2012	7:26:03 PM	H2 valve closed
8/26/2012	7:26:03 PM	BCl3 valve closed
8/26/2012	7:26:03 PM	PH3 valve closed
8/26/2012	7:26:03 PM	SiCl4 pre valve closed
8/26/2012	7:26:03 PM	SiCl4 post valve closed
8/26/2012	7:26:03 PM	Bypass valve closed
8/26/2012	7:26:03 PM	Bubbler valve closed
8/26/2012	7:26:03 PM	Main Vac valve opened
8/26/2012	7:26:03 PM	Helium MFC set to  0.000000
8/26/2012	7:26:03 PM	H2 MFC set to  0.000000
8/26/2012	7:26:03 PM	BCl3 MFC set to  0.000000
8/26/2012	7:26:03 PM	PH3 MFC set to  0.000000
8/26/2012	7:26:03 PM	SiCl4 MFC set to  0.000000
8/26/2012	7:26:04 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	7:26:04 PM	Tube furnace set to 0
8/26/2012	7:26:34 PM	H2 valve closed
8/26/2012	7:26:34 PM	BCl3 valve closed
8/26/2012	7:26:34 PM	PH3 valve closed
8/26/2012	7:26:34 PM	SiCl4 pre valve closed
8/26/2012	7:26:34 PM	SiCl4 post valve closed
8/26/2012	7:26:34 PM	Bypass valve closed
8/26/2012	7:26:34 PM	Bubbler valve closed
8/26/2012	7:26:34 PM	Helium valve opened
8/26/2012	7:26:34 PM	Main Vac valve opened
8/26/2012	7:26:34 PM	Helium MFC set to  20.000000
8/26/2012	7:26:34 PM	H2 MFC set to  0.000000
8/26/2012	7:26:34 PM	BCl3 MFC set to  0.000000
8/26/2012	7:26:34 PM	PH3 MFC set to  0.000000
8/26/2012	7:26:34 PM	SiCl4 MFC set to  0.000000
8/26/2012	7:26:34 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	7:26:34 PM	Tube furnace set to 0
8/26/2012	7:27:04 PM	Helium valve closed
8/26/2012	7:27:04 PM	H2 valve closed
8/26/2012	7:27:04 PM	BCl3 valve closed
8/26/2012	7:27:04 PM	PH3 valve closed
8/26/2012	7:27:04 PM	SiCl4 pre valve closed
8/26/2012	7:27:04 PM	SiCl4 post valve closed
8/26/2012	7:27:04 PM	Bypass valve closed
8/26/2012	7:27:04 PM	Bubbler valve closed
8/26/2012	7:27:04 PM	Main Vac valve opened
8/26/2012	7:27:04 PM	Helium MFC set to  0.000000
8/26/2012	7:27:04 PM	H2 MFC set to  0.000000
8/26/2012	7:27:04 PM	BCl3 MFC set to  0.000000
8/26/2012	7:27:04 PM	PH3 MFC set to  0.000000
8/26/2012	7:27:04 PM	SiCl4 MFC set to  0.000000
8/26/2012	7:27:04 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	7:27:04 PM	Tube furnace set to 0
8/26/2012	7:27:34 PM	H2 valve closed
8/26/2012	7:27:34 PM	BCl3 valve closed
8/26/2012	7:27:34 PM	PH3 valve closed
8/26/2012	7:27:34 PM	SiCl4 pre valve closed
8/26/2012	7:27:34 PM	SiCl4 post valve closed
8/26/2012	7:27:34 PM	Bypass valve closed
8/26/2012	7:27:34 PM	Bubbler valve closed
8/26/2012	7:27:34 PM	Helium valve opened
8/26/2012	7:27:34 PM	Main Vac valve opened
8/26/2012	7:27:34 PM	Helium MFC set to  20.000000
8/26/2012	7:27:34 PM	H2 MFC set to  0.000000
8/26/2012	7:27:34 PM	BCl3 MFC set to  0.000000
8/26/2012	7:27:34 PM	PH3 MFC set to  0.000000
8/26/2012	7:27:34 PM	SiCl4 MFC set to  0.000000
8/26/2012	7:27:34 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	7:27:34 PM	Tube furnace set to 0
8/26/2012	7:28:04 PM	Helium valve closed
8/26/2012	7:28:04 PM	H2 valve closed
8/26/2012	7:28:04 PM	BCl3 valve closed
8/26/2012	7:28:04 PM	PH3 valve closed
8/26/2012	7:28:04 PM	SiCl4 pre valve closed
8/26/2012	7:28:04 PM	SiCl4 post valve closed
8/26/2012	7:28:04 PM	Bypass valve closed
8/26/2012	7:28:04 PM	Bubbler valve closed
8/26/2012	7:28:04 PM	Main Vac valve opened
8/26/2012	7:28:04 PM	Helium MFC set to  0.000000
8/26/2012	7:28:04 PM	H2 MFC set to  0.000000
8/26/2012	7:28:04 PM	BCl3 MFC set to  0.000000
8/26/2012	7:28:04 PM	PH3 MFC set to  0.000000
8/26/2012	7:28:04 PM	SiCl4 MFC set to  0.000000
8/26/2012	7:28:04 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	7:28:05 PM	Tube furnace set to 0
8/26/2012	7:28:32 PM	Run aborted at 7:28 PM
8/26/2012	7:28:32 PM	Helium valve closed
8/26/2012	7:28:32 PM	H2 valve closed
8/26/2012	7:28:32 PM	BCl3 valve closed
8/26/2012	7:28:32 PM	PH3 valve closed
8/26/2012	7:28:32 PM	SiCl4 pre valve closed
8/26/2012	7:28:32 PM	SiCl4 post valve closed
8/26/2012	7:28:32 PM	Bypass valve closed
8/26/2012	7:28:32 PM	Main Vac valve closed
8/26/2012	7:28:32 PM	Bubbler valve closed
8/26/2012	7:28:32 PM	Helium MFC set to  0.000000
8/26/2012	7:28:32 PM	H2 MFC set to  0.000000
8/26/2012	7:28:32 PM	BCl3 MFC set to  0.000000
8/26/2012	7:28:32 PM	PH3 MFC set to  0.000000
8/26/2012	7:28:32 PM	SiCl4 MFC set to  0.000000
8/26/2012	7:28:33 PM	Tube furnace set to 0
8/26/2012	7:28:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/26/2012	7:28:40 PM	Main Vac valve opened
8/26/2012	7:28:55 PM	Main Vac valve closed
8/26/2012	7:29:09 PM	Main Vac valve opened
8/26/2012	7:30:24 PM	Recipe started at 7:30 PM
8/26/2012	7:30:24 PM	Helium valve closed
8/26/2012	7:30:24 PM	H2 valve closed
8/26/2012	7:30:24 PM	BCl3 valve closed
8/26/2012	7:30:24 PM	PH3 valve closed
8/26/2012	7:30:24 PM	SiCl4 pre valve closed
8/26/2012	7:30:24 PM	SiCl4 post valve closed
8/26/2012	7:30:24 PM	Main Vac valve closed
8/26/2012	7:30:24 PM	Bypass valve closed
8/26/2012	7:30:24 PM	Bubbler valve closed
8/26/2012	7:30:24 PM	Helium MFC set to  0.000000
8/26/2012	7:30:24 PM	H2 MFC set to  0.000000
8/26/2012	7:30:24 PM	BCl3 MFC set to  0.000000
8/26/2012	7:30:24 PM	PH3 MFC set to  0.000000
8/26/2012	7:30:24 PM	SiCl4 MFC set to  0.000000
8/26/2012	7:30:24 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	7:30:24 PM	Tube furnace set to 0
8/26/2012	7:30:27 PM	Helium valve closed
8/26/2012	7:30:27 PM	BCl3 valve closed
8/26/2012	7:30:27 PM	PH3 valve closed
8/26/2012	7:30:27 PM	SiCl4 pre valve closed
8/26/2012	7:30:27 PM	SiCl4 post valve closed
8/26/2012	7:30:27 PM	Main Vac valve closed
8/26/2012	7:30:27 PM	Bypass valve closed
8/26/2012	7:30:27 PM	Bubbler valve closed
8/26/2012	7:30:27 PM	H2 valve opened
8/26/2012	7:30:27 PM	Helium MFC set to  0.000000
8/26/2012	7:30:27 PM	H2 MFC set to  500.000000
8/26/2012	7:30:27 PM	BCl3 MFC set to  0.000000
8/26/2012	7:30:27 PM	PH3 MFC set to  0.000000
8/26/2012	7:30:27 PM	SiCl4 MFC set to  0.000000
8/26/2012	7:30:27 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	7:30:27 PM	Tube furnace set to 0
8/26/2012	7:31:40 PM	Helium valve closed
8/26/2012	7:31:40 PM	BCl3 valve closed
8/26/2012	7:31:40 PM	PH3 valve closed
8/26/2012	7:31:40 PM	SiCl4 pre valve closed
8/26/2012	7:31:40 PM	SiCl4 post valve closed
8/26/2012	7:31:40 PM	Main Vac valve closed
8/26/2012	7:31:40 PM	Bypass valve closed
8/26/2012	7:31:40 PM	H2 valve opened
8/26/2012	7:31:40 PM	Bubbler valve opened
8/26/2012	7:31:40 PM	Helium MFC set to  0.000000
8/26/2012	7:31:40 PM	H2 MFC set to  500.000000
8/26/2012	7:31:40 PM	BCl3 MFC set to  0.000000
8/26/2012	7:31:40 PM	PH3 MFC set to  0.000000
8/26/2012	7:31:40 PM	SiCl4 MFC set to  0.000000
8/26/2012	7:31:40 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	7:31:40 PM	Tube furnace set to 0
8/26/2012	7:31:41 PM	Helium valve closed
8/26/2012	7:31:41 PM	BCl3 valve closed
8/26/2012	7:31:41 PM	PH3 valve closed
8/26/2012	7:31:41 PM	SiCl4 pre valve closed
8/26/2012	7:31:41 PM	SiCl4 post valve closed
8/26/2012	7:31:41 PM	Main Vac valve closed
8/26/2012	7:31:41 PM	Bypass valve closed
8/26/2012	7:31:41 PM	H2 valve opened
8/26/2012	7:31:41 PM	Bubbler valve opened
8/26/2012	7:31:41 PM	Helium MFC set to  0.000000
8/26/2012	7:31:41 PM	H2 MFC set to  450.000000
8/26/2012	7:31:41 PM	BCl3 MFC set to  0.000000
8/26/2012	7:31:41 PM	PH3 MFC set to  0.000000
8/26/2012	7:31:41 PM	SiCl4 MFC set to  0.000000
8/26/2012	7:31:41 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	7:31:41 PM	Tube furnace set to 1000
8/26/2012	7:56:41 PM	Helium valve closed
8/26/2012	7:56:41 PM	PH3 valve closed
8/26/2012	7:56:41 PM	Main Vac valve closed
8/26/2012	7:56:41 PM	Bypass valve closed
8/26/2012	7:56:41 PM	H2 valve opened
8/26/2012	7:56:41 PM	BCl3 valve opened
8/26/2012	7:56:41 PM	SiCl4 pre valve opened
8/26/2012	7:56:41 PM	SiCl4 post valve opened
8/26/2012	7:56:41 PM	Bubbler valve opened
8/26/2012	7:56:41 PM	Helium MFC set to  0.000000
8/26/2012	7:56:42 PM	H2 MFC set to  450.000000
8/26/2012	7:56:42 PM	BCl3 MFC set to  1.500000
8/26/2012	7:56:42 PM	PH3 MFC set to  0.000000
8/26/2012	7:56:42 PM	SiCl4 MFC set to  50.000000
8/26/2012	7:56:42 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	7:56:42 PM	Tube furnace set to 1000
8/26/2012	8:01:42 PM	Helium valve closed
8/26/2012	8:01:42 PM	BCl3 valve closed
8/26/2012	8:01:42 PM	PH3 valve closed
8/26/2012	8:01:42 PM	SiCl4 pre valve closed
8/26/2012	8:01:42 PM	SiCl4 post valve closed
8/26/2012	8:01:42 PM	Main Vac valve closed
8/26/2012	8:01:42 PM	Bypass valve closed
8/26/2012	8:01:42 PM	H2 valve opened
8/26/2012	8:01:42 PM	Bubbler valve opened
8/26/2012	8:01:42 PM	Helium MFC set to  0.000000
8/26/2012	8:01:42 PM	H2 MFC set to  500.000000
8/26/2012	8:01:42 PM	BCl3 MFC set to  0.000000
8/26/2012	8:01:42 PM	PH3 MFC set to  0.000000
8/26/2012	8:01:42 PM	SiCl4 MFC set to  0.000000
8/26/2012	8:01:42 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	8:01:42 PM	Tube furnace set to 750
8/26/2012	8:06:42 PM	H2 valve closed
8/26/2012	8:06:42 PM	BCl3 valve closed
8/26/2012	8:06:42 PM	PH3 valve closed
8/26/2012	8:06:42 PM	SiCl4 pre valve closed
8/26/2012	8:06:42 PM	SiCl4 post valve closed
8/26/2012	8:06:42 PM	Main Vac valve closed
8/26/2012	8:06:42 PM	Bypass valve closed
8/26/2012	8:06:42 PM	Helium valve opened
8/26/2012	8:06:42 PM	Bubbler valve opened
8/26/2012	8:06:42 PM	Helium MFC set to  500.000000
8/26/2012	8:06:42 PM	H2 MFC set to  0.000000
8/26/2012	8:06:42 PM	BCl3 MFC set to  0.000000
8/26/2012	8:06:42 PM	PH3 MFC set to  0.000000
8/26/2012	8:06:42 PM	SiCl4 MFC set to  0.000000
8/26/2012	8:06:42 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	8:06:42 PM	Tube furnace set to 0
8/26/2012	8:20:16 PM	Helium valve closed
8/26/2012	8:20:16 PM	H2 valve closed
8/26/2012	8:20:16 PM	BCl3 valve closed
8/26/2012	8:20:16 PM	PH3 valve closed
8/26/2012	8:20:16 PM	SiCl4 pre valve closed
8/26/2012	8:20:16 PM	SiCl4 post valve closed
8/26/2012	8:20:16 PM	Main Vac valve closed
8/26/2012	8:20:16 PM	Bypass valve closed
8/26/2012	8:20:16 PM	Bubbler valve closed
8/26/2012	8:20:16 PM	Helium MFC set to  0.000000
8/26/2012	8:20:16 PM	H2 MFC set to  0.000000
8/26/2012	8:20:16 PM	BCl3 MFC set to  0.000000
8/26/2012	8:20:16 PM	PH3 MFC set to  0.000000
8/26/2012	8:20:16 PM	SiCl4 MFC set to  0.000000
8/26/2012	8:20:16 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	8:20:16 PM	Tube furnace set to 0
8/26/2012	8:20:17 PM	Run finished at 8:20 PM
8/26/2012	8:20:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/26/2012	8:20:23 PM	Recipe started at 8:20 PM
8/26/2012	8:20:23 PM	Helium valve closed
8/26/2012	8:20:23 PM	H2 valve closed
8/26/2012	8:20:23 PM	BCl3 valve closed
8/26/2012	8:20:23 PM	PH3 valve closed
8/26/2012	8:20:23 PM	SiCl4 pre valve closed
8/26/2012	8:20:23 PM	SiCl4 post valve closed
8/26/2012	8:20:23 PM	Main Vac valve closed
8/26/2012	8:20:23 PM	Bypass valve closed
8/26/2012	8:20:23 PM	Bubbler valve closed
8/26/2012	8:20:23 PM	Helium MFC set to  0.000000
8/26/2012	8:20:23 PM	H2 MFC set to  0.000000
8/26/2012	8:20:23 PM	BCl3 MFC set to  0.000000
8/26/2012	8:20:23 PM	PH3 MFC set to  0.000000
8/26/2012	8:20:23 PM	SiCl4 MFC set to  0.000000
8/26/2012	8:20:23 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	8:20:23 PM	Tube furnace set to 0
8/26/2012	8:20:26 PM	H2 valve closed
8/26/2012	8:20:26 PM	BCl3 valve closed
8/26/2012	8:20:26 PM	PH3 valve closed
8/26/2012	8:20:26 PM	SiCl4 pre valve closed
8/26/2012	8:20:26 PM	SiCl4 post valve closed
8/26/2012	8:20:26 PM	Main Vac valve closed
8/26/2012	8:20:26 PM	Bypass valve closed
8/26/2012	8:20:26 PM	Bubbler valve closed
8/26/2012	8:20:26 PM	Helium valve opened
8/26/2012	8:20:26 PM	Helium MFC set to  500.000000
8/26/2012	8:20:26 PM	H2 MFC set to  0.000000
8/26/2012	8:20:26 PM	BCl3 MFC set to  0.000000
8/26/2012	8:20:26 PM	PH3 MFC set to  0.000000
8/26/2012	8:20:26 PM	SiCl4 MFC set to  0.000000
8/26/2012	8:20:26 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	8:20:27 PM	Tube furnace set to 0
8/26/2012	8:20:27 PM	Helium valve closed
8/26/2012	8:20:27 PM	H2 valve closed
8/26/2012	8:20:27 PM	BCl3 valve closed
8/26/2012	8:20:27 PM	PH3 valve closed
8/26/2012	8:20:27 PM	SiCl4 pre valve closed
8/26/2012	8:20:27 PM	SiCl4 post valve closed
8/26/2012	8:20:27 PM	Main Vac valve closed
8/26/2012	8:20:27 PM	Bypass valve closed
8/26/2012	8:20:27 PM	Bubbler valve closed
8/26/2012	8:20:27 PM	Helium MFC set to  0.000000
8/26/2012	8:20:27 PM	H2 MFC set to  0.000000
8/26/2012	8:20:27 PM	BCl3 MFC set to  0.000000
8/26/2012	8:20:27 PM	PH3 MFC set to  0.000000
8/26/2012	8:20:27 PM	SiCl4 MFC set to  0.000000
8/26/2012	8:20:27 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	8:20:27 PM	Tube furnace set to 0
8/26/2012	8:20:28 PM	Run finished at 8:20 PM
8/26/2012	8:20:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/26/2012	8:24:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/26/2012	8:24:37 PM	Recipe started at 8:24 PM
8/26/2012	8:24:37 PM	Helium valve closed
8/26/2012	8:24:37 PM	H2 valve closed
8/26/2012	8:24:37 PM	BCl3 valve closed
8/26/2012	8:24:37 PM	PH3 valve closed
8/26/2012	8:24:37 PM	SiCl4 pre valve closed
8/26/2012	8:24:37 PM	SiCl4 post valve closed
8/26/2012	8:24:37 PM	Main Vac valve closed
8/26/2012	8:24:37 PM	Bubbler valve closed
8/26/2012	8:24:37 PM	Bypass valve opened
8/26/2012	8:24:37 PM	Helium MFC set to  0.000000
8/26/2012	8:24:37 PM	H2 MFC set to  0.000000
8/26/2012	8:24:37 PM	BCl3 MFC set to  0.000000
8/26/2012	8:24:37 PM	PH3 MFC set to  0.000000
8/26/2012	8:24:37 PM	SiCl4 MFC set to  0.000000
8/26/2012	8:24:37 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	8:24:37 PM	Tube furnace set to 0
8/26/2012	8:25:47 PM	Helium valve closed
8/26/2012	8:25:47 PM	H2 valve closed
8/26/2012	8:25:47 PM	BCl3 valve closed
8/26/2012	8:25:47 PM	PH3 valve closed
8/26/2012	8:25:47 PM	SiCl4 pre valve closed
8/26/2012	8:25:47 PM	SiCl4 post valve closed
8/26/2012	8:25:47 PM	Main Vac valve closed
8/26/2012	8:25:47 PM	Bubbler valve closed
8/26/2012	8:25:47 PM	Bypass valve opened
8/26/2012	8:25:47 PM	Helium MFC set to  0.000000
8/26/2012	8:25:47 PM	H2 MFC set to  0.000000
8/26/2012	8:25:47 PM	BCl3 MFC set to  0.000000
8/26/2012	8:25:47 PM	PH3 MFC set to  0.000000
8/26/2012	8:25:47 PM	SiCl4 MFC set to  0.000000
8/26/2012	8:25:47 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	8:25:47 PM	Tube furnace set to 0
8/26/2012	8:26:47 PM	Helium valve closed
8/26/2012	8:26:47 PM	H2 valve closed
8/26/2012	8:26:47 PM	BCl3 valve closed
8/26/2012	8:26:47 PM	PH3 valve closed
8/26/2012	8:26:47 PM	SiCl4 pre valve closed
8/26/2012	8:26:47 PM	SiCl4 post valve closed
8/26/2012	8:26:47 PM	Bypass valve closed
8/26/2012	8:26:47 PM	Bubbler valve closed
8/26/2012	8:26:47 PM	Main Vac valve opened
8/26/2012	8:26:47 PM	Helium MFC set to  0.000000
8/26/2012	8:26:47 PM	H2 MFC set to  0.000000
8/26/2012	8:26:48 PM	BCl3 MFC set to  0.000000
8/26/2012	8:26:48 PM	PH3 MFC set to  0.000000
8/26/2012	8:26:48 PM	SiCl4 MFC set to  0.000000
8/26/2012	8:26:48 PM	Bypass solenoid MFC set to  0.000000
8/26/2012	8:26:48 PM	Tube furnace set to 0
8/26/2012	8:26:49 PM	Run finished at 8:26 PM
8/26/2012	8:26:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
